NCG/CG1

74 + l 75 + l 4 4 4 4 5 5 6 6 32 36 44 54 66 82 100 120 6 6 7 7 10 12 11 14 44 49 58 71 86 106 125 150 20 22 25 30 40 45 55 65 47 7 15 10 3 130 (138) + l 20 110 (118) 45 (53) 52 7 15 137.5 (145.5) + l 10 3.5 25 115.5 (123.5) 45 (53) 53 139.5 (147.5) + l 8 16 10 3.5 32 117.5 (125.5) 83.5 + l 51 (60) 63.5 8.5 16.5 10 4 155 (164) + l 40 135 (144) 95.5 + l 55 (67) 50 75.5 11 22 17.5 5 177.5 (

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

MY1

MY1HT50/63 R L L R L R L R L R Slide table operating direction 8-11-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8-11-10 11 Basic Type Series MY1B MX MTS MY 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Table of Contents

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

5-Port Solenoid Valve

Valve Replacement Parts Name plate part number Model SS5Y3-10 SS5Y5-10/11 SS5Y7-(M)10/11 Note Name plate Printed SY30M-86-lN SY50M-86-lN SY70M-86-lN m:Number of stations (1 to 24) No printing SY30M-86-l SY50M-86-l SY70M-86-l With Residual Pressure Release Valve Name plate bracket assembly part number and number of items ordered Vacuum Release Valve with Restrictor Model SS5Y3-10 SS5Y5-10/

Electric Actuator

100) upper limit 1,000 1,000 Suction flow rate: 30 L/min Suction flow rate: 60 L/min ISO Class 4 (Class 10) upper limit 100 100 Suction flow rate: 50 L/min ISO Class 4 (Class 10) upper limit 10 10 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 Particle diameter [m] Particle diameter [m] 11-LEFS40 Speed 1000 mm/s 10,000,000 ISO Class 5 (Class 100) upper limit ISO Class 6 (Class 1000

ISO Cylinder

b g (k) l3 j e (l) c d7 d6 h [mm] [mm] Bore size Part no. b c d f g j k e l 8 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 10 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

130 (138) + l 6 6 7 7 10 12 11 14 32 10 110(118) 44 15 38.5 22 45(53) 3 3.5 7 74 + l 137.5(145.5) + l 36 10 115.5(123.5) 49 15 45 25 45(53) 3 3.5 8 75 + l 139.5(147.5) + l 44 10 117.5(125.5) 58 16 54.5 30 51(60) 3 4 8.5 83.5 + l 155(164) + l 54 10 135(144) 71 16.5 2-LC (Knock pin position) 70.5 40 55(67) 4.5 5 11 95.5 + l 177.5(189.5) + l 66 17.5 157.5(169.5) 86 22 CJ1 LS + Stroke 82.5 45

smcmaintenancepartslist

NBR FKM KA00809 KA00725 Quantity 1 1 1A-P85 4D-P85 FNR100N-10 1.1 L Rc1 Stainless steel 304 FNR100V-10 FNR101N-10 FNR101V-10 Model Tank capacity Port size 1.8 L 4 O-ring Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Magnetically Coupled Rodless Cylinder

Dimensions Attached from top Helical insert tap 6, 10 Note 2) Attached from bottom: MD Body 6, 10 (mm) FNote 1) R Note 2) MM PA LA C M L B W MD HB Model 6 10 15 20 25 32 40 50 63 A HA M3 x 0.5 x 3 l 12 15 35 17 18 11 10 6.3 2.5 M3 x 0.5 x 3 l 17 18 38 25 26 15 10 9.5 2.5 25 25 6.5 4 57 35 36 M3 23 16 6 M4 x 0.7 16.5 5.5 27 30 6.5 4 66 36 37 M3 23.5 18 6 M5 x 0.8 17 5.5 36 30 8.0 5

Hydraulic

thread depth 8 10 (11) Rod end male threads M M 48 24.5 D D 10 10 2-5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

Electric Grippers

[mm] Model Bolt Max. tightening torque [Nm] 7 Max. screw-in depth L [mm] Model Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 M3 x 0.5 0.9 M4 x 0.7 1.4 6 LEHF10 LEHF20 LEHF32 LEHF40 M4 x 0.7 M5 x 0.8 1.4 3.0 8 Step Motor (Servo/24 VDC) M5 x 0.8 8 M6 x 1 3.0 5.0 10 M6 x 1 10 M6 x 1 5.0 5.0 10 Attachment M6 x 1 10 M8 x 1.25 5.0 12.0 14 Finger Finger Attachment When using

Table of Contents

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

SYJ300/500/700

(G), (H): 10-SYJ34MG H-M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6[50.8] (Light/surge voltage suppressor) 41.5[48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector

Electric Actuator

5: LEYG16 B M L Lead 5: LEYG16 AB M L Lead 10: LEYG16 AA M L 4.4 4.4 Lead 10: LEYG16 A M L 0 0 600 0 100 200 300 400 500 600 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LEYG25 l M LEYG25 Al M L L 33 66 Lead 3: LEYG25 C M L Lead 3: LEYG25 AC M L Vertical work load [lb] Vertical work load [lb] 22 44 Lead 6: LEYG25 B M L Lead 6: LEYG25 AB M L 11 22 Lead 12: LEYG25 A M L Lead 12: LEYG25 AA