Air Cylinder Series CS1

300 125 140 160 180 200 Up to 1400 22 22 36 164 98 230 253 238 261 1401 to 1600 Lube Non-lube Air-hydro Lube Non-lube Air-hydro Up to 1400 19 19 36 184 98 227 250 232 255 1401 to 1600 Up to 1400 22 22 45 204 248 269 252 273 1401 to 1600 106 Up to 1500 26 26 45 228 272 290 281 299 Lube Non-lube 1801 to 2000 115 Up to 998 26 26 45 257 272 290 286 304 1801 to 2000 120 Lube Non-lube Dimensions

7ND9071en

7 Actuator Total Travel 250 [>=0] 4 Max.

Hydraulic

20 80 65 1/4 stroke 100 M18 x 1.5 25 to 1800 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 50 84 19 15 100 80 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) CDH9 E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 250 +0.043 0 -0.025 -0.064 40 40 36 M16 x 1.5 25 22 18 7 14 55 250 40 M20 x 1.5 30 27 22.4 9 19 60 255

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

AC Servo Motor Driver

Servo motor Flange size [mm] LE-250 250 6 S5S6S7 250 250 12 S8 (5) About wiring protection For installation in United States, branch circuit protection must be provided, in accordance with the National Electrical Code and any applicable local codes.

5 Port Solenoid Valve Series VQZ1000/2000/3000

-04 KQ2P-06 KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.

7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 185.5 198 210.5 210.5 223 223 235.5 248 248 260.5 260.5 273 285.5 285.5 123 135.5 135.5 148 148 160.5 173 173 185.5 112.5 125 125 137.5 137.5 150 162.5 162.5 175 175 187.5 200 200 212.5 212.5 225 237.5 237.5 250 250

High Power Cylinder Series RHC

K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

0.4

Purchasing order is available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

Series VQ Base Mounted Metal Seal/Rubber Seal

260.5 16 212.5 230.5 250 260.5 17 223 241 262.5 273 18 233.5 251.5 275 285.5 19 244 262 287.5 298 20 254.5 272.5 300 310.5 21 265 283 312.5 323 22 275.5 293.5 325 335.5 23 286 304 325 335.5 24 296.5 314.5 337.5 348 L1 L2 (L3) (L4) Vacuum ejector unit style: Equation Manifold F kit (Top entry connector)SV5Q11M, #1 F kit (Side entry connector)SV5Q11M, #2 Valve 2 position singleSV5Q11V, #9

LEC-OM071xx

This product supports level 03H. 00H: 31.25, 62.5, 125, 250, 500 (sec), 2 to 64 (msec) (2 msec increment) 01H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (1 msec increment) 02H: 31.25, 62.5, 125, 250, 500 (sec), 1 to 64 (msec) (0.5 msec increment) 03H: 31.25, 62.5, 125, 250, 500, 750 (sec), 1 to 64 (msec) (0.5 msec increment) 18H Binary Data Minimum Value of Communication Cycle 4 bytes

CY1

Bore size (mm) 6 10 Content CYR 15 E CYR 6ENos.18, 19, 22, 27 at the left CYR10ENos.18, 19, 20, 22, 27 at the left Note 2) Nos.17, 18, 20, 22, 27 at the left 15 CYR15EStroke CYR20EReed switch 20 Solid state switch CYR20EN25 32 40 50 63 Bore size CYR25ENos. CYR32E17, 18, 19, 20, 22, 27 CYR40Eat the left CYR50ECYR63ENote 1) indicates the stroke.

Electric Actuators

200 250 Speed [mm/s] Speed [mm/s] LEPY10(L) (Basic/Compact) Horizontal Vertical 5.5 5.5 Lead 5 (LEPY10K) 4.4 4.4 Lead 5 (LEPY10K) Work load [lb] Work load [lb] 3.3 3.3 Lead 10 (LEPY10J) 2.2 2.2 Lead 10 (LEPY10J) 1.1 1.1 0 350 300 0 50 100 150 0 350 300 0 50 100 150 200 250 200 250 Speed [mm/s] Speed [mm/s] 3 Model Selection Series LEPY Force Conversion Graph (Guide) LEPY LEPS LECP6 LECP1

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

4/5 Port Solenoid Valve

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to back page 11 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B

MGG

14 depth 10 19 21 22 150 45 50 M10 x 1.5 depth 20 182 194 37 120 170 11 55 103 M14 x 2 depth 25 38 7 11 12 7 300 17 depth 12 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) PG PL W X XA Y Z R Y K L M N O Q R S V T U 20 25 32 40 250 to 400 350 to 500 350 to 600 350 to 800 30.5 74 52 30 3 152 194 14 160 20 25 32 40 80 106 35 60 M6 x 1 depth 9 94 12 26 65 16 114 35.5 82 62