MNB

13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000 100 16 178 1/4 14 116 114 37 4 54 189 16 89 120 19 150 40 41 30 20 75 170 26 Bore size (mm) T

MNB

13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000 100 16 178 1/4 14 116 114 37 4 54 189 16 89 120 19 150 40 41 30 20 75 170 26 Bore size (mm) T

MXS

198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.

Slide Unit Series CX2/CXWM/CXWL

M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.

Slide Unit Series CX2/CXWM/CXWL

M L M L M L M L 472 Slide Unit: Built-in Shock Absorber Slide Bearing Type Series CXWM 10, 16, 20, 25, 32 How to Order Port thread type M thread 10 to 20 Nil Rc 1/8 TN 25, 32 NPT 1/8 16 150 CXWM TF G 1/8 150 J79W DB 16 C XWM With auto switch Made to Order Refer to page 474 for the Made to Order specifications.

MY1

PP 12 17 18.5 QQ 16 16 24 VV 16 19 23 TT 14.5 16 20 WW 12.5 16 19.5 UU 15 16 22 XX 28 32 36 SS 6 4 10.5 RR 16 23 27 Model MY1H25G MY1H32G MY1H40G "P" indicates cylinder supply ports.

Series SV

134 13.5 96 4 185.5 175 150 18 112 5 198 187.5 166 16 128 6 210.5 200 182 14.5 144 7 223 212.5 198 12.5 160 8 248 237.5 214 17 176 9 260.5 250 230 15.5 192 10 273 262.5 246 13.5 208 11 285.5 275 262 12 224 12 310.5 300 278 16.5 240 13 323 312.5 294 14.5 256 14 335.5 325 310 13 272 15 360.5 350 326 17.5 288 16 373 362.5 342 15.5 304 L1 L2 L3 L4 L5 20 EX500 Decentralized Serial Wiring Series

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

Air Slide Table Series MXQ

6H9 depth 6 +0.030 0 HA GA 6H9 depth 6 +0.030 0 Section AA Section BB (mm) ZZ 123 123 123 133 157 182 221 274 299 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 K 35 45 55 65 75 100 125 150 175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4

Compact Manifold Regulator Series ARM5

8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Air Slide Table

depth 6 +0.030 0 12 11 12 35 A B NN x M8 x 1.25 Tapped through hole 7 6H9 depth 6 +0.030 0 HA GA Section AA Section BB (mm) ZZ 123 123 123 133 157 182 221 274 299 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 K 35 45 55 65 75 100 125 150 175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80

MXS Series Air Slide Table

16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16 on P. 60 for one with

7.5

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 160.5 173 185.5 185.5 198 198 210.5 223 223 235.5 248 248 260.5 260.5 273 150 162.5 175 175 187.5 187.5 200 212.5 212.5 225 237.5 237.5 250 250 262.5 135.9 143.4 150.9 158.4 165.9 173.4 180.9 188.4 195.9 203.4 210.9 218.4 225.9 233.4 240.9 12.5 15 17.5 13.5 16 12.5 15 17.5 13.5 16 18.5 15 17.5 13.5 16 45 Series

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Guide Cylinder Series MGG

35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

Table of Contents

-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure IS3000 IS1000 ISG11/ISG21 ZSM1 ISG19/ISG29 ISG13/ISG23 ISG12/ISG22 Model Fluid General pneumatic General pneumatic General fluids Calibration method Pressure adjusting

Basic type / Direct mount type Series CY3B/CY3R

C Q + Stroke Shock absorber Shock absorber (mm) d B A H G FB FA D C L JK J HI HG Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HB HA GP EB EA LD HT HS HP HO 12 9.5 7.5 40 6.5 6 3 16.6 5 75 9.5 M6 x 1.0 14 16 4 6.5 65 13 6 5.6 16 25 39 38 16 9.5 9.5 46 8.5 21.6 5.2 86 10 M6 x 1.0 16 18 10 9 80 5.6 20 31 45 44 16 11 9.5 54 8.5 7 4 26.4 6.5 86 10 M8 x 1.25 21 23 18 9 90 14 8 7 20 39 53 52 20

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

150 162.5 L3 69.5 153.5 80 90.5 101 111.5 122 132.5 143 L4 14 16 15 16 17 12 13 14 15 112 Body Ported 10-SY3000/5000/7000 Type 60 Dimensions [ ]: AC 10-SS5Y3-60Stations B Manual override L3 (L4) D side U side M5 x 0.8 (A, B port) 8 4.1 35 1 (3) 26 22.5 44.4 [46.6] 88.8 [93.2] 97.3 [101.7] 30.7 22.2 22.2 10.2 P P 5.5 B B A B B B B 4.7 R R A A A A A (Lead wire length) Approx. 300 DIN rail

SV

to 16 solenoids possible.)