24

124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

CM2

9 28 9 18 24 24 5 15.5 10 30 8 M8 X 1.25 13 20 8 41 20 M10 X 1.25 17 6 M26 X 1.5 15 14 9 33.5 9 22 30 30 5.5 19.5 10 30 10 13 25 8 45 26 M10 X 1.25 17 6 M26 X 1.5 15 14 9 37.5 9 22 34.5 30 5.5 19.5 10 30 12 13 32 8 45 26 M14 X 1.5 M32 X 2 22 8 21.5 18 10 46.5 11 24 42.5 38 7 21 15 39 14 16 40 11 50 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150

Valve Single Unit

129 15.5 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171 13.5 Stations n L1 L2 L3 L4 11 stations 223 212.5 192 15.5 12 13 14 15 16 17 18 19 20 stations 210.5 200 181.5 14.5 235.5 225 202.5 16.5 248 237.5 213 17.5 248 237.5 223.5 12 260.5 250 234 13 273 262.5 244.5 14 285.5 275 255 15 298 287.5 265.5 16 310.5 300 276 17 1-6-78 Exploded View/DIN Rail Manifold Type

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

134.1 13 94.5 6 173 162.5 144.6 14 105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17 199.5 16 273 262.5 249.6 11.5 210 L1 L2 L3 L4 L5 187 EX500 Decentralized Serial Wiring 10-SV Dimensions: Series 10-SV2000

Basic type / Direct mount type Series CY3B/CY3R

14 B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 H 13.5 12.5 13 20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122

Electric Actuator

15 D x 150 (= E) 60 778 10 4 600 606 B [mm] 878 12 5 750 706 Model L 561.5 610.5 661.5 710.5 761.5 810.5 A B n D E 11-LEFS40;-200 11-LEFS40;-200B 11-LEFS40;-300 11-LEFS40;-300B 11-LEFS40;-400 11-LEFS40;-400B 378 6 2 300 978 14 6 900 206 806 478 6 2 300 1078 14 6 900 306 906 578 8 3 450 1178 16 7 1050 406 1006 25 Electric Actuator/Slider Type Belt Drive Step Motor (Servo/24 VDC) Servo Motor

Table of Contents

1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60 1 The VX series will be revised shortly.

Table of Contents

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

Square Tube Type Air Cylinder Series MB1

19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12.5 16.5 23.5 23.5 Bracket Combinations Bracket combination table -Refer to table together with combination drawings.

mb1

x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114

70astamb1

x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114

Programless controller Step motor (servo 24 VDC)

4000 150 4000 14 350 4500 175 4500 15 400 5000 200 5000 59 No.

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

MNB

1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Full length dimension = A + Stroke = ( + Stroke) + Stroke Bore size (mm) I Q S U Z J C K D L E M H N O 32 M8 x 1.25 60 9 depth 7 12.5 58.5 31.5 14 4.5 13 14 16 7 45 34 5.5 40 M8 x 1.25 69 14 9 depth 7 14 66 35 5 13 14 16 7 52 40 5.5 50 86 19 14 80 41 11 depth 8 7 15 17 20 8 64 50 6.6 M10 x 1.5 7-6-38 39 Series CQ2W/CDQ2W Compact Cylinder: Standard Type Double Acting, Double Rod Foot