Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

Air Cylinder Series MB

x 18 l 4 x 25 l 4 x 35 l CL1 MLGC Note) Cotter pins and flat washers are included.

Environment

1 y i o !

Digital Flow Switch (Integrated display type)

U8 3 Y 0: inS (Instantaneous flow) Measurement mode display screen setting 2000 0x07D0 0 R/W Display mode U8 0 Y 1: AC (Accumulated flow) 2: ioL (IO-Link mode) Resolution setting: only for 1 L, 10 L and 100 L 2010 0x07DA 0 R/W Display resolution U8 0 Y 0: 1000 resolution 1: 100 resolution -81No.PF-OMW0007-E Product individual parameters (continued) Index Sub Access 1 Parameter Data Data Initial

SQ1000/2000

L RUN SERIAL UNIT L ERR.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-207 Exploded View of Manifold Plug-in Unit/VQ1000 (F, P, L, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit 1.10-208 Exploded View of Manifold Plug-in Unit/VQ2000 (F, P, L, G, S kit

ZP

P G H: M6 x 1 H: M8 x 1.25 G H: M5 x 0.8 H: M6 x 1 Model A B C D E F K L Y G ZPR10B 10 13 12 16 25 33.9 50 5.5 15 18.5 27.5 36.4 52.5 5 Model A B C D E F K L Y G ZPR40B 40 50 43 34 47.5 58.3 76.1 24.4 53 38 51.5 62.3 80.1 6 6 8.7 19 13.8 7.5 5.5 ZPR13B 8 32.4 57 48 19 16 ZPR50B 16 18 20 29 37.9 54 9.9 21 8.5 ZPR16B Applicable Tubing Applicable Tubing Applicable tubing O.D.

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 L4 max Size (mm) E3 = E1 = Y = 10 X L1 L3 max Size 3 to 8 Y-1 5-( 8-Y) to (Y-1 ) L2 = 10 15 L4 = 9-(14-X) to (X-3) 5 to 14 X-3 3 to 9 Y-1.5 6-( 2-Y) to (Y-1.5) L1 = L3 = 15 20 10-(18-X) to (X-4) 8 to 18 X-4 3 to 10 Y-1.5 7-(10-Y) to (Y-1.5) 20 30 10-(20-X) to (X-4.5) 10 to 20 X-4.5 5 to 13 Y-2 8-(13-Y) to (Y-2 ) X = 30 40 10 to

Proposals for Energy Saving

min or l).]

Modular F.R.L. Units

When the set pressure is 0.15 MPa or less, the valve q may not open due to the valve spring w force. 100 AW20-B to AW60-B Series AW20K-B to AW60K-B Series Construction AW60(K)-B AW20(K)-B AW30(K)-B/AW40(K)-B w y w y q w y q q IN OUT IN OUT IN OUT u r t i u r t i r e t Drain AW20K-B to AW60K-B (Filter Regulator with Backflow Function) u Drain o i A-A A SMC K P C U O S L H o t Drain A Component

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

EX120/121/122

y t Shown with cover removed.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Grommet, L and M plug connector Note 2) "D", "DO", "Y", "YO" are available for SY5000 only.

CC-Link-E

t y w i t h l ow ri ppl e.

Compact 5-Port Solenoid Valve

Molded cover L Seal (Length) 2 x M2.6 x 0.45 16 44 8 (2.4) 015 Connector JBZ-25S-3 made by J.S.T. Mfg. Co., Ltd. Connector hood L Terminal no.

Air Cylinder

Axial foot: CBM2L Bore size Stroke 4 x LD 2 x LC LH B CJ1 X Y Z Y X LT CJP ZZ + Stroke LS + Stroke LZ LX Rod flange: CBM2F Bore size Stroke * -H -R -W CJ2 N L Head flange: CBM2G Bore size Stroke -H -R -W N L JCM 4 x FD Mounting hole 2 x FD C2 CM2 CM2 Mounting hole FY CM3 B FX FZ FT Z + Stroke CG1 FT Z 20 to 32 40 CG3 Single clevis: CBM2C Bore size Stroke -H -R -W N L CD JMB MB MB1 U L

Profi-E

S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.

Air Cylinder

P + Stroke Y F CW CW 2-EE (NPTF) D Across Flats C CD KK AA LR EA MM B DD CB G J R WF LF + Stroke E L ZB + Stroke M A XD + Stroke (in) B G DD CB J D M F EA AA Bore (in) LF XD WF LR R Y ZB A P MM C L KK CD CW E EE 1 1/8 1.26 1/4-28 3/4 1.1 9/16 0.62 3/8 0.3 2.02 150 (1.5") 3 5/8 5 3/8 1 0.75 1.43 1.71 4.75 3/4 2.36 5/8 3/8 0.62 7/16-20 1/2 1/2 2 3/8 1 1/8 1.26 5/16-24 3/4 1.06 9/16 0.62 3/8

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

DeviceNet-E

S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.