Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

COM (+) () (+) () SOL.A 1A Station 1 (+) () SOL.B 1B (+) () SOL.A 2A Station 2 (+) () SOL.B 2B (+) () SOL.A 3A Station 3 (+) () SOL.B 3B (+) () SOL.A 4A M2.5 Station 4 (+) () SOL.B 4B (+) () SOL.A 5A Cover 1st row 3rd row 2nd row -Step 2. Wiring The diagram on the left shows the terminal block wiring schematic. All stations are provided with double solenoid wiring.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

The fixed cushion mechanism does not require the conventional cushion adjustment. 168 Disassembly and Maintenance 12-CY1B/3B 12CY1R/3R Warning Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 1.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

COM (+) () (+) () SOL.A 1A Station 1 (+) () SOL.B 1B (+) () SOL.A 2A Station 2 (+) () SOL.B 2B (+) () SOL.A 3A Station 3 (+) () SOL.B 3B (+) () SOL.A 4A M2.5 Station 4 (+) () SOL.B 4B (+) () SOL.A 5A Cover 1st row 3rd row 2nd row -Step 2. Wiring The diagram on the left shows the terminal block wiring schematic. All stations are provided with double solenoid wiring.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 8-16-10 10 MX MTS MY CY MG CX D-X 20Data 8-16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless

Low Profile Guide Type

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 1550 Magnetically Coupled Rodless Cylinder: Low Profile Guide Type 10, 15, 25 CY1F Series How to Order CY1F R 10 300 M9BW Made to Order Refer to page 1552 for details.

15

M3E = 1/3 x FE x Y = 1/3 x 188.7 x 25/1000 = 1.6 [Nm] 3B = M3E/M3max = 1.6/17.1 = 0.09 M3 Refer to [3] Calculation for Overall Center of Gravity in the Y-axis on front matter 7.

0.4

SOL.A 2A SV Station 2 SOL.B 2B SOL.A 3A Station 3 SOL.B SYJ 3B SOL.A 4A Step 2. Wiring Loosen screws on the terminal block, connect wiring and complete it by tightening screws.(Tightening torque: 0.5 to 0.7 Nm) The diagram on the right shows the terminal block wiring. All stations are provided with double wiring regardless of the valves which are mounted.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MSUA7-180 P402060-3B MSUA2090 P402080-3A MSUA20-180 P402080-3B Note 1) Note that the rotation angle should not be changed even though the rotary unit has been changed. For maintenance, order units with a part number suitable for the model being used.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 8-16-10 10 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

HEC-OM-S008

32 3C 0D Answer 25.0 deg.C 31 Temperature setting (without writing FRAM) 2 01 32 02 31 32 35 30 30 03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B

CY1

CY1RG10H 2b 3b !5 !6 @4 !4 !1 q !0 i @6 @9 r !9 !8 @2 @1 @3 t !2 y u o @5 @8 @0 #0 CY1RG15H CY1RG20H to 63H @1 r q i !0 @6 @9 !1 !4 @4 !6 !5 3b 2b !9 !8 @2 @1 !9 !8 @2 @0 #0 @3 @7 !7 o u y @5 t @8 !2 !3 For CY1RG20 For CY1RG15 Replacement parts: Seal kits * Seal kits are the same for both the standard type and the centralized piping type.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Mechanically Jointed Rodless Cylinder/Basic Type Series MY3A/3B 16, 20, 25, 32, 40, 50, 63 How to Order B M9BW 16 300 HL Basic MY3 Type Short type (Rubber bumper) Standard type (Air cushion) Number of auto switches A Nil S n 2 pcs. 1 pc. n pcs. B Made to Order For details, refer to page 14.

AC Servo Motor Driver (Network card type ）

7 6A SDO2A+ TOFCOM 8 6B SDO2A8A TOFA CN3 EM2 (Aaxis) M Servo motor CN9 SDI1B+ 2A 2B SDI1BMC Driver Servo amplifier SDO1B+ 3A CN8B CN8 Control circuit 3B SDO1BSTO1 4 STO2 5 CN10 4A SDI2B+ STOCOM 3 4B SDI2BTOFB1 6 2A SRESB+ FG 2B SRESBTOFB2 7 5A SDO2B+ TOFCOM 8 5B SDO2B8B TOFB CN3 EM2 (Baxis) +24 V 7A M 0 V 7B Servo motor 0 V 13 8 13.

Hydraulic Filters

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model Flange port size Note) Rated flow rate (L/min) Model/Rated Flow Rate FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 1/2B 30 3/4B 50 1B 95 1 1/4B 150 1 1/2B 220 2B 350 2 1/2B 550 3B 770 3 1/2B 1000 4B 1300 The symbol represented by indicates the type of applicable hydraulic fluid.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-55-2B(-Q) SY5000-55-2B(-Q) SY7000-55-3B(-Q) Applicable series 10-SY3000 Port size 5/16" One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting Assembly part no. SY3000-54-3C(-Q) SY5000-54-2C(-Q) SY7000-54-3C(-Q) Applicable series 10-SY5000 10-SY3000 10-SY7000 10-SY5000 10-SY7000 [When supplying the manifold with 2 different supply pressures.]

Exhaust Cleaner for Vacuum Pump AMV Series

Port size Exhaust cleaner for vacuum pump 10 14 20 30 40 R1 R1 R2 80 (3B) JIS 10K FF flange 1 2 Captures and separates 99.5% of even low-flow and highly concentrated greasy fumes. Using the AMV series, greasy fumes cannot be visibly recognized in the exhaust from the vacuum pump. (When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.)

Basic Type/Direct Mount Type

2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no. Both sides piping Centralized piping CYR6EBContents CYP Bore size Numbers , , !9, @2, @7 above Numbers , , !

Air Tank Series AT 1

1 Air Tank Series AT Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size 0.97 Rc 1/2 Rc 3/4 Rc 11/2 2B flange 3B flange 4B flange Set pressure for safety valve (MPa) 0.97 1.46 0 to 100 Proof pressure (Under water pressure) (