VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

Thermo-chiller

Power consumption P: 7 [kW] Q = P = 7 [kW] Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] w Derive the heat generation amount from the power supply output.

Fieldbus System

27 Type 12 Top Ported P. 37 Series SV1000/2000/3000 P. 39 Series S0700 P. 47 Series VQC1000 P. 51 Series VQC2000 P. 55 Series VQC4000 P. 59 Series VQC5000 P. 62-1 26 A EX600 Type 10 Side Ported 5 Port Solenoid Valve Type 11 Bottom Ported Series SY3000/5000/7000 RoHS How to Order Manifold SS5Y S6 10 3 Q C6 05 U 2 Refer to the SY3000/5000/7000 series catalog (CAT.ES11-103) for dimensions of

VS7-6

VS7 VQ7 How to calculate flow rate Power Source and Wiring Refer to p.0-36 for flow rate calculations. qMake sure all contacts are secure. wVoltage should be held within the allowable voltage range. 1.19-3 VS7-6 Construction VS7-6-FG-D--Q VS7-6-FG-S--Q VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q VS7-6-FHG-D-R-Q Replacement Parts Part No.

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

New

L L G1/2 H E H E U F F 2 P 2 P G G Port size Port size Faston terminal A B C D K J I 1/4 Exhaust port 11 Q R S 12.5 L H E U F G 2 P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 20 169 68.5 47.5 20 VXF24A< Q R U 169 23 20 175 U 14 Series VXF2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Basic type / Direct mount type Series CY3B/CY3R

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

LVQ

N.C. valve Q E (P) R Sensor (breathing) port Rc 1/8 (NPT 1/8) LQ3 integral fitting 1/8 ( 3, 4) Pilot port Rc 1/8 (NPT 1/8) Pilot port F K A B A B J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQm0-Zmm Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-Zmm LVQ30-Zmm LVQ40-Zmm LVQ50-Zmm LVQ60-Zmm 25.5 46 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21

Mechanically Jointed Rodless Cylinder Series MY1

MY1B25/32/40 Stroke L (LL) 4 x MM depth M 2 x 2 x B counterbore depth C LD through-hole PA YW YH QW NW PB PG Q + Stroke Floating bracket mounting thread (2 x JJ thread depth from bottom of counterbore KK) PC LW 2 x T counterbore depth E P (Hexagon socket head taper plug) P (Port) PD 1 PP QQ PP QQ RR SS RR SS H NE NH NC TT UU TT UU G G Cushion needle P (Port) GB P 2 x P (Hexagon socket head

Modular F.R.L. Units

1 q r e w t i u y o !0 !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190

100

unit only (kPa) P With unit switching function (Initial value psi) D Vacuum pressure switch *3 For q, the units for metric spec. fittings are in kPa.

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

V

R G E V O LTA G E S U P P R E S S O R With E W/O Light / With Surge Voltage Suppressor H O W T O O R D E R S U B P L A T E S E R I E S V Q 4 0 0 0 VQ4000 P Plug In Conduit Terminal E L E C T R I C A L E N T R Y E N C L O S U R E Dust Proof W Dust Tight Jet Proof P I P I N G Side Piping B Bottom Piping P O R T S I Z E 02 1/4 03 3/8 T H R E A D T Y P E Rc N NPT T NPTF F G Courtesy of Steven

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Push holder (P) Aluminum alloy Hard anodized 1 !1 o Piston (P) Aluminum alloy Hard anodized 2 q Rod holder Aluminum alloy Hard anodized 3 Bumper u !0 !

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.