Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

ZP

EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Vacuum Pad

Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P Attachment mounting thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)

CQM

45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 7-5-6 7 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Dimensions 12 to 25 CUJ CU V V 16 12 CQS 2 x 2-OB counterbore with depth RB 2-M5 x 0.8 Auto switch CQM 2-HB

CY1F

socket head plug) EY HA GB EH KC KH H GB GA HB G GA N N KW A Z + Stroke Adjustment bolt GD GC Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5

CYP

HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69

CYPSeries

HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155

CYPSeries

HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155

Clean Room Rodless Cylinder Series CYP ø15, ø32

HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155

Step Motor Controller

This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Specifications Basic Specifications Item Specifications Compatible motor Unipolar connection type 2-phase HB step motor Power voltage: 24 VDC 10% Current consumption: 3 A (Peak 5 A) Note 2) [Including motor drive power, control power, stop, lock release] Power supply Note 1) Parallel input Parallel output

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Step Motor Controller

This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Specifications Basic Specifications Item Specifications Compatible motor Unipolar connection type 2-phase HB step motor Power voltage: 24 VDC 10% Current consumption: 3 A (Peak 5 A) Note 2) [Including motor drive power, control power, stop, lock release] Power supply Note 1) Parallel input Parallel output

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

socket head plug) EY HA GB EH KC KH H GB GA HB G GA N N KW A Z + Stroke Adjustment bolt GD GC Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5

Low Profile Guide Type

head plug) (Piping port) EY HA GB EH KC CY3B CY3R KH H GB GA HB N G N A GA KW CY1S GD GC Z + Stroke Adjustment bolt CY1L CY1H Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F CY1F CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon socket head plug) EY HA GB EH KC KH H GB GA HB G GA N N KW A Z + Stroke Adjustment bolt GD GC Model Standard stroke EB A EA EH ES EW EY G GA GB GC GD H HA HB HW CY1F10 49 10 16 7 6.5 16 27 9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155