XL-OMY0002

0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16 P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030

AC Servo Motor Driver (Pulse input type/Positioning type)

002 (LEC-MR-RB-032) 0 (+ 0 (+ 1 (+ 0 (+ 1 (+ 1 (+ Counter Counter Counter Rotation direction selection PA14 0 Counter Counter Counter motors motors motors motors motors motors side) side) side) side) side) side) Adaptive tuning mode PB01 000 002 000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 000 030

High Vacuum L Type Valve

AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.

MHL2

MHL2-16D MHL2-16D1 MHL2-16D2 SMHL, #2 SMHL2A, #3 SMHL2A, #4 (#4+#5) 2.2-8 Series MHL2 Dimensions MHL2-20Dl 10 10 11 2-M6 X 1 Thread depth 7 (Mounting thread) D Closed J A cross view (Fingers closed) C B A 4H9 +0 030 0 Depth 4 2-6.6 (Body mounting hole) 52 6.45 5 5 4-M6 X 1 Thread depth 12 (Mounting thread) 5 4H9 +0 030 0 Depth 4 Dimensions of auto switch mounting groove (Enlarged view) 27H9

SV

Core wire colors 1 1 2 3 4 5 2 :DRAIN 5 Red: V+ Black: V White: CAN H Blue: CAN L 4 3 Socket connector pin arrangement Connections (3) Cable with M12 connector EX500 AC SSPS 030 Cable length (l) Connector specifications 003 005 010 030 050 SSPS SAPA 300 mm 500 mm 1000 mm 3000 mm 5000 mm Socket side: Straight, Plug side: Straight Socket side: Angle, Plug side: Angle M12 52 l M12 M12 48 6 6

SX

AXT100-DS25015 030 050 L Terminal no.

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal

Blue .025 O-025 Black .030 O-030 Beige .035 O-035 Dk. Grey .040 O-040 Teal