5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Free Mount Cylinder

-www.stevenengineering.com 4-T counterbore W + Stroke S + Stroke Z + 2 x Stroke 16 to 32 2-M5 x 0.8 (32: Rc 1/8) Rod end nut 2-P through Auto switch Width across flats L 2-P through Width across flats L A' 4-T counterbore S + Stroke W + Stroke Z + 2 x Stroke Rod End Nut/Accessory Material: Carbon steel Part no.

5 Port Solenoid Valve

R2) 1 (P) 5 (R1) 3 (R2) q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5200 VQC5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5301 VQC5401 (A) 4 (B) 2 (A) 4 (B) 2 VQC5300 VQC5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQC5500 (A) 4 (B) 2 VQC5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P) VQ Component

JXCx-OMT0023

device selection 3 (CN1-11) P, S, T PC12 TC Internal torque command T PD18 *DO4 Output signal device selection 4 (CN1-12) P, S, T PC13 *ENRS Encoder output pulses selection P, S, T PD19 *DIF Input filter setting P, S, T PC14 TL2 Internal torque limit 2 P, S, T PD20 *DOP1 Function selection D-1 P, S, T PC15 ERZL Error excessive alarm detection level P, S, T PD21 For manufacturer setting PC16

Stainless Steel 316 Fittings

3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 6 P. 12 Straight Union KQG2H Extended Male Elbow KQG2W Union Y KQG2U Metric Inch P. 3 P. 9 Metric Inch P. 5 P. 11 Metric Inch P. 7 P. 12 Male Elbow KQG2L Different Diameter Tee KQG2T Metric Inch P. 4 P. 10 Metric Inch P. 5 P. 11 Female Connector KQG2F Metric Inch P. 7 P. 13 Male Branch Tee KQG2T Plug-in Reducer KQG2R Metric Inch P. 4 P. 10 Metric

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~dth across flats 12 \ Appllcable tube 0.0. , p MBX.ds II ~\Width across ha ls 12 A "I \ APPhcable tube 0 .0. . p A w M6 X I.25 w .. ; 8 --, 0 0 u >1 ~ j uj >l l/' ~ .L Ud I .tll II PA .8 J Flat with rib Flat with rib Deep type/ ZPR25D only Deep type/ ZPR400 only a r H Width across flats 12 '.~ 11i. .f "'I ~'--:;~m2L I T ~l 1-'--' R \ APpl;cabla luba 0 .0. , p II:I!

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

NCQ8

0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

5 Port Air Operated Valve

qe r q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Valve Single Unit

Stations W = 39n + 83 W = 48n + 99 W = 67n + 118 W = 88n + 151 W = 109n + 174 Socket: 26 pins MIL with strain relief (Conforming to MIL-C-83503) +COM (Type 41P, 42P), COM (Type 41N, 42N) 12, 24 VDC Applicable flat ribbon cable connector Internal wiring (2) Rated voltage Note 1) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides

45

+ 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

AC Servo Motor Driver (Network card type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Pilot Operated

2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !