VFS

Rc 1 8 Plug-in type VVFS2000-R-01-1 Non plug-in type VVFS2000-R-01-2 Body type Part no. Rc 1 4 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type VVFS2000-21A-1 Non plug-in type VVFS2000-21A-2 Part no. SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block disk in between stations subjected to different pressures.

VFR

VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body type Plug-in type Non plug-in type VVFS2000-R-01-1 VVFS2000-R-01-2 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type Non plug-in type 1 8 Rc Part no.

SX

-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

VQZ1000/2000/3000

) (For Rc 3/8) (For Rc 3/8) 33 3 4 5 3 4 5 L plug connector (L): VQZ3 50 1(R)-L-02 03 DIN terminal (Y): VQZ3 50 1(R)-Y-02 03 Indicator light 300 157 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 300 62 <67> 55 <60> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 3 4 5 M plug connector (M): VQZ3 50 1(R)-M-02 03 60.5 (Lead wire length)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

port thread type -+ -+ Number of stations P port 1/8 R R P 02 2 stations Nil 00F 00N 00T Rc G NPT NPTF : : R port 1/8 20 20 stations Type 40 (5 port / Base mounted) Applicable solenoid valve 10-SYJ54310-SYJ553Applicable blanking plate assembly SYJ5000-21-4A How to Order 10 SS5YJ5 40 05 M5 P port 1/8 Clean series P, R port thread type Number of stations 02 2 stations Applicable individual

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

smcmaintenancepartslist

G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-

5 Port Solenoid Valve Series VQZ1000/2000/3000

/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length) 57 [64] 152.6 Max. 10 Applicable cable O.D. 3.5 to 7 72.8 Pg7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ325 (R)-M10 1 02 03 68.3 [75.3]

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

SYJ300/500/700

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

5 Port Solenoid Valve

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

0.4

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

Table of Contents

ZP R 16 K20 A10 06 UGN [Pad model no.] Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Pressure Gauge Guide

G43-4-01 to 02 G43-6-01 G43-7-01 to 02 G43-10-01 to 02 8 1 R , 4 1 R IC 8 1 R MPa 8 1 R , 4 1 R VBA Note) Do not apply pressure more than the maximum display pressure.