MXS Series Air Slide Table

Note2) Functional options are not available for MXS L.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

Dual Speed Controller with One-touch Fitting Series ASD 1

L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Rotary Cylinder Series MRQ Size: 32, 40 1

A = 0.06 x 40.2 x {(0.5 + 0.1)/0.1}/0.5 = 28.6 l/min B = 0.06 x 4.88 x {(0.5 + 0.1)/0.1}/0.5 = 3.5 l/min C = B = 3.5 l/min D = 0.06 x 33.7 x {(0.5 + 0.1)/0.1}/0.5 = 24.3 l/min Since operation is simultaneous at C and D, total the respective amounts of air requirement.

MXF

2.1 M3 x 0.5 1.2 MXF16 MXF16 6.7 6.7 M5 x 0.8 4.4 M4 x 0.7 2.8 MXF20 MXF20 8.5 8.5 M5 x 0.8 4.4 M4 x 0.7 2.8 Caution 0.02 mm or less of flatness is recommended.

V

www.stevenengineering.com I 2.23 SOLENOID VALVES SERIES VQ0 H O W T O O R D E R B A S E M O U N T E D T Y P E V A L V E S I N G L E U N I T V Q 0 0 0 0 5 VQ 0 L 1 5 0 C4 S U B P L AT E SUPC Y L I N D E R P O R T S .Without subplate C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 M5 M5 (10-32Nom) N1 One Touch Fitting 1/8 N3 One Touch Fitting 5/32 S E R I E S VQ0 C O N F I G U R

Basic type / Direct mount type Series CY3B/CY3R

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

Mechanically Jointed Rodless Cylinders

R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Electric Grippers

on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque [Nm] 6 Max. screw-in depth L [mm] Model Model Bolt Bolt LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) LEHZ32 LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M4 x 0.7 M5 x 0.8 1.4 3.0 M4 x 0.7 12 M6 x 1 6 1.4 5.0 M5 x 0.8 M8 x 1.25 16 8 3.0 12.0 M6

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.