Table of Contents

How to Order CEP1 B 50 12 F9BW Number of auto switches Nil 2 pcs. Mounting style B L F 12 mm equivalent S 1 pc.

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

•

Changeable Range 01 Tie Rod Length (mm) Model' CS2 Bore-size 125 ' 140 160 Mounling brack.1 L 1!I, I'i q , C"D, T L I B, F, G, 'C, 0 , T L IB, F, G, C, 0, T ' -Mminimum 20 1 12 21 1 12 23 1 14 M.ro' axirourn . 270 rn 3 o o ~ n '5. ::J C.

modular-press-e

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

01, AS2211FG-01 AS2201FG-02, AS2211FG-02 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.

0.

2(A) port] 12 7.5 41 2 x 3.4 (For mounting) 3.5 34 3.5 Manual override 2 A 2 A 24 + R 3 P 1 38.4 (Lead wire length) 53.8 Approx. 300 40.9 35.5 30.5 PE 16 7.5 7.5 1/8 [1(P), 3(R) port] 14.5 7 M5 x 0.8 (PE port) L-type plug connector (L): VQZ115l-lLl1-01 M-type plug connector (M): VQZ115l-lMl1-01 (Lead wire length) Approx. 300 50.7 [52.9] 53.8 [60.8] 65.1 [72.1] (Lead wire length) Approx. 300

3 Port Air Operated Valve Series SYJA300

SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O. Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Speed Controller with Indicator

rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

KP/KPQ/KPG

Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06