Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration Certificate)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual, Calibration

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Modular F.R.L. Unit

T-interface (T) Factory mounting of a piping adapter on the AC models is available as a special order. M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-interface facilitates the redirection of air flow.

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

MY1

Q 153 191 206 264 322 QW 30 36 42 51 59 Z 160 200 220 280 340 NW 37 45 53 64 75 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Hydraulic

T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

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AdaprOf PHiS I J t ~ (r I Re I .m."~ =~~P~a'~-t -, .~.@. Deteriorated Pad 36 Vacuum Pad/Components VacuumPad/Components Part/ Pad(With Lock Ring) Flat type pad Flat type pad with rib ZPlOCO-5OCO ZP02UO 08UO .0 oC (mm, ' , 19.5 3,e I C 'A . t El' K; 11'0 E ' Part No.

AC Servo Motor Driver

P S T PC18 *BPS Alarm history clear P S T PD12 *DI10 Input signal device selection 10 (CN1-pin 45) P S T PC19 *ENRS Encoder output pulses selection P S T PC20 *SNO Parameter block P S T PD13 *DO1 Output signal device selection 1 (CN1-pin 22) P S T PC21 *SOP communication function selection P S T PD14 *DO2 Output signal device selection 2 (CN1-pin 23) P S T PC22 *COP1 Function selection C