Electric Actuator

Time [s] Method 2: Calculation T1 T2 T3 T4 T5 Cycle time T can be found from the following equation. T6 T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T1 and T3 can be obtained by the following equation.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

HRX-OM-W004

Silent interval is indicated by T1-T2-T3-T4. Table 3.8.2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Max. 20 stations) Note) Indicate "Nil" for types T, T1, and S.

Metal Seal/Rubber Seal Series VQ Body Ported

Types with 15 pin are also available. For details, refer to page 2-4-68.

Thermo-chiller

Applicable model Min. operating flow rate [L/min] HRL-BP002 HRLE050-m-m CH1: 15/15 (50/60 Hz) CH2: 1/1 (50/60 Hz) HRL-BP001 HRLE090-m-m CH1: 25/35 (50/60 Hz) CH2: 1/1 (50/60 Hz) CH1 Circulating fluid return port Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 u q r t i !0 CH2 Circulating fluid return port Applicable hose I.D.: 15 o u !

Thermo-chiller

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 23 Cooing Capacity Calculation Series HRS100/150 Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

energy saving effect

temperature 32C 25 25 Ambient temperature 43C Cooling capacity [kW] Cooling capacity [kW] 24 20 20 Facility water temperature 40C 15 15 Ambient temperature 45C 10 10 5 5 5 10 15 20 25 30 35 0 5 10 15 20 25 30 35 0 Circulating fluid temperature [C] Circulating fluid temperature [C] 170 Thermo-chiller Inverter Type HRSH Series If the product is used at altitude of 1000 m or higher, refer

HRS100/150

= Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 8.4 [kW] HED V 20C After 15 minutes, cool 32C down to 20C.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Lightweight and Compact

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment T = T2 T1 7325 [W] = 7.3 [kW] Cooling

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Table of Contents

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Table of Contents

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

33

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C.

LEC-OM036xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECG1).14 (2) DIN rail mount type (LECG1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4. Initial Setting.16 4. 1. Switch (NODE Address, B RATE) .16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3.

LEC-OM034xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LEC-GPR1).14 (2) DIN rail mount type (LEC-GPR1D) .14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4. Initial Setting.16 4. 1. Switch (Address, B RATE).16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3.