Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa/psi Dual Scale

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa/psi Dual Scale

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 5m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC40, Thread Type: NPT, Port Size: 3/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa/psi Dual Scale

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Silencer Series AN

Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT Effective Orifice mm2 (Cv) D I M E N S I O N S SERIES NAN SILENCER NAN200-N02 14 35 (1.9) NAN300-N03 38 60 (3.3) Dimensions (mm) Model NAN400-N04 12 90 (5.0) A B D NAN500-N06 34 160 (8.8 NAN200-N02 63 22 19 NAN600-N10 1 270 (15) NAN300-N03 84 25 22 NAN700-N12 114 440 (24) NAN400-N04 92 30 27 NAN800-N14

Pulse Valve

D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5 92.5 36 19.3 48.8 JSXFAF-10 1 94 63.5 110.5 44 22.2 60.2 JSXFAF-14

2

40 28.4 7.5 11 12 KQ2T12-00A 18.5 23 32.3 17 10.7 8 4.2 57.4 45.4 9 15.7 16 KQ2T16-00A 23.8 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O 2 x N M Q L1 L2 Q D D L1 M L1 M Note) D is maximum diameter.

5

8.5 9.5 9.5 10.5 D-F5m/J59/F5mW D-J59W/F5BA D-F5NT/F59F 4 4 4.5 4.5 4.5 D-Z7m/Z80 8.5 7.5 9.5 9.5 10.5 D-A3m/A44 D-A3mC/A44C 9 10 11 11 11 D-A5m/A6m D-G5m/K59/G5mW D-K59W/G5BA D-G5NT/G59F 5 6 6.5 6.5 7 D-G5NB 35 35 40 40 40 D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-B5m/B64 D-A59W 13 13 14 14 15 D-B59W 14 14 17 16 18 D-P3DWA 4.5 4.5 5.5 5.5 5.5 D-P4DW 4 4 4.5 4 4.5 Values which include hysteresis

Hydraulic

MA B D-F9BAL A Proper auto switch mounting positions (mm) 32 to 100 D-Z7, D-Z8, D-Y5 D-Y, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W A 10 12 13 16.5 18.5 26.5 B 16.5 18.5 22.5 26 35 44.5 32 40 50 63 80 100 A B D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) SMC D-Y7BAL Bore size (mm) SMC MA 32 40 50 63 80 100 32.5 37 43 51.5 62 74.5 Approx.

Air Cylinder Series CA2

90 95 105 80 85 D-Z7/Z80 D-Y59/Y7P D-Y7W 105 + 40 (n 4) 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) (n 4) 2 95 + 40 n (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 65 2 (Different surfaces and same surface) 1 10 75 80 90 D-Y69/Y7PV D-Y7WV n 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 90 + 30 (n 4) 2 (n = 4, 8,

Air Cylinder

Bore size Auto switch model 40 50 63 80 100 40 50 63 80 100 D-Y59D-Y7P/Y7D-Y7D-Y7BA D-A9D-M9D-M9D-M9D-F5D-J59W/F5BA D-F5NT/F59F D-Z7D-A3D-A3D-G5D-K59W/G5BA D-G5NT/G59F 5 6 6.5 6.5 7 9 10 11 11 11 D-A5D-G5NBL

Cylinder with Lock

9.5 10.5 4 4 4.5 4.5 4.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 4.5 5 5.5 5 6 D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-Z7/Z80 5 6 6.5 6.5 7 8.5 7.5 9.5 9.5 10.5 D-A3/A44 D-A3C/A44C D-G5NBL 35 35 40 40 40 9 10 11 11 11 D-A5/A6 D-B5/B64 D-A59W D-B59W D-G39/K39 D-G39C/K39C 9 9 10 10 11 D-P3DW D-P4DWL 4.5 5 6 5.5 6 13 13 14 14 15 4 4 4.5 4 4.5 14 14 17 16 18 Since this is a guideline including hysteresis

MGG

D-H7BAL D-H7 D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C Applicable bore size A Hs Hs Hs Hs A A A A A A B B B B B B B 20 30.5 27.5 27.5 27 24.5 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 45.5 29.5 25 30.5 30 30 29.5 27 41.5 25.5 45 27 43.5 28.5 42 27 40 24 44.5 29.5 45.5 32 31.5 33.5 33.5 33 30.5 41.5 26.5 46 28 44.5 29.5 43 28 40 25 45.5 30.5 46.5 40 36.5 38 38 37.5 35 50.5 31.5 55.5 33 53.5

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Secondary Batteries

Applicable cylinder series: 90-/91-CDLQ, 90-RSDQ Applicable auto switches : D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-A90L-900 Applicable bore size (mm) Cylinder series 20 25 32 40 50 Auto switch mounting brackets are not required.

CHKD/CHKG

Minimum Auto Switch Mounting Stroke (mm) D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number D-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 6 5.5 4.5 5.5 5.5 6.5 8.5 9.5 D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA 8 9.5

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Compact Cylinder Series CQS

Grease pack part no.: GR-S-010 (10 g) 578 Series CQSK Compact Cylinder: Non-rotating Rod Type Double Acting, Single Rod Mounting Bolt for CQSK C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting method: Mounting bolt for through-hole

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs