Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Size: 20, Thread: N (NPT), Port Size: 03 (3/8), Options: LPR (L + P + R), -A: -A

Size: 20, Thread: Rc, Port Size: 02 (1/4), Options: LPR (L + P + R), -A: -A

Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Options: LPR (L + P + R), -A: -A

Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Options: LPR (L + P + R), -A: -A

Size: 40, Thread: NPT, Port Size: 1/2, Options: L + P + R, -A: -A

Size: 20, Thread: NPT, Port Size: 3/8, Options: L + P + R, -A: -A

Size: 20, Thread: Rc, Port Size: 1/4, Options: L + P + R, -A: -A

Size: 30, Thread: NPT, Port Size: 3/8, Options: L + P + R, -A: -A

Size: 20, Thread: NPT, Port Size: 1/4, Options: L + P + R, -A: -A

Size: 40, Thread: NPT, Port Size: 3/8, Options: L + P + R, -A: -A

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Body Ported Type Vacuum Ejector ZH Series

13 One-touch Screw-in One-touch N03 N04 N04 Screw-in Screw-in Screw-in 4 Screw-in: NPT female threads 3 Screw-in: Rc female threads 223

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,