Cylinder with Lock

ring is attached. 4 x FD TX FB FY ZZ + Stroke FT TT FZ FX TY [mm] With Rubber Bumper [mm] Bore size ZZ 32 206 40 224 50 250 63 262 80 325 100 345 Bore size FB FD FT FX FY FZ TT TX TY ZZ 32 56 7 10 72 38 87 17 48 49 200 40 65 9 10 83 46 101 22 55 58 218 50 77 9 12 100 52 120 22 68 71 242 63 92 9 12 115 62 135 28 81 81 254 80 100 12 16 126 63 153 34 102 102 315 100 120 14 16 150 75 178 40

CQS

Rear flange With auto switch W/o auto switch Bore (mm) Stroke range (mm) FD FT FV FX FZ L L1 B 17 17 19.5 22.5 A 31 31 42 45.5 B 22 22 29.5 32.5 A 26 26 32 35.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 5, 10 (All dimensions are common between standard stroke and long stroke except "A", "B" and "CL".)

VFS

Note 3) Values for VFS200-FZ-01. Note 4) Factors of Note 1) and Note 2) are ones achieved in controlled clean air.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

(mm) A L M FV FV 10 10 to 40 45 8 L FT B + Stroke FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 25 10 to 50,75,100 62 12 30 10 to 50,75,100 68.5 12 40 10 to 50,75,100 70 12 (Dimensions other than A and L are the same as the front flange type.) 6 MQQ Series Dimensions Lateral load resisting/Basic type (Through hole & Double end tapped): MQQLB 10, 16, 20 H effective thread

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10112122Rubber bumper GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) FZ 42 42 FY 20 20 FX 33 33 FT 2.3 2.3 FC 5.5 5.5 17.5 19 FB 11 11 GC 17 20 C 15 18.3 B 90 91 Z 54 55 S 9.5 9.5 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 NN M4 x 0.7 M5 x 0.8

CV/MVGQ

6 73 15 23 14 42 9.5 61 45.5 5.5 25 M5 x 0.8 12.5 52.5 Single Acting, Spring Return/Rod Side Flange Style (F) CVJ3F S Bore size Stroke 48 [49] M5 x 0.8 28 [34.5] M5 x 0.8 Manual override Width across flats B1 Rod End Nut H1 B1 Bore size (mm) 10 16 16 [17] 7 3.2 S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) HX H FZ

Compact Cylinder with Air Cushion

Flange material: Carbon steel Rod end nut L1 Rear flange type Rear flange type/RQG, RDQG mm Bore size (mm) Stroke range (mm) A 15 to 50 20 44.5 FV FW 15 to 50 25 49.5 mm B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male threads 25 5 44.5 64 36.5 42 52 } Rear flange type Double clevis type Applicable (All dimensions but A is identical

CV/MVGQ

2.3 6 61 15 23 14 42 9.5 45.5 5.5 25 M5 x 0.8 12.5 52.5 Single Acting, Spring Return/Rod Side Flange Style (F) CVJ3F S Bore size Stroke 48 [49] M5 x 0.8 28 [34.5] M5 x 0.8 Manual override Width across flats B1 Rod End Nut H1 B1 Bore size (mm) 10 16 16 [17] 7 3.2 S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) HX H FZ

RQ

Data Flange material: Carbon steel Rod end nut L1 Head Side Flange Style Head side flange style: RQG/RDQG Bore size (mm) Stroke range (mm) A 20 15 to 50 44.5 FV FW 25 15 to 50 49.5 B + Stroke A + Stroke 2-6.6 L Bore size (mm) 8 FX B L FV FW FX FZ FZ 20 4.5 40.5 60 32 39 48 Rod end male thread 25 5 44.5 64 36.5 42 52 } (All dimensions but A is identical to those of the basic style.)

CJ2

A WA FC B WB FT C WW FX D S FY F Z FZ FB GA GB H MM NA NB NN 14.5 15 14.5 4.5 15 13.5 1.6 17 4.5 24 4 63 14 8 91 32 7.5 6.5 28 M4 X 0.7 21 18 M8 X 1.0 19 M10 X 1.0 15 14.5 5.5 18 13.5 2.3 20 5.5 33 5 64 20 8 92 42 7.5 6.5 28 M5 X 0.8 21 18 Double Clevis (D) CJ2ZD Bore size Stroke Material: Iron d C B H Part No.

Compact Cylinder with Air Cushion Series RQ

(mm) Bore size (mm) L1 L A RQ 63 8 33.5 30 to 100 72 M FV 80 10 43.5 40 to 100 84.5 CQM 100 12 43.5 40 to 100 99 FT L B + Stroke A + Stroke FX FZ 4 x FD All dimensions but A, L and L1 are identical to those of the rod side flange style.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Front Flange Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) Without auto switch With auto switch Without/with auto switch A 17 17 19.5 22.5 B 35.5 35.5 44 47.5 A 22 22 29.5 32.5 B 45.5 45.5 55.5 59 A 32 32 41 44 B 12 16 20 25 30.5 30.5 34 37.5 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 L1 Bore (mm) 12 16 20 25 L FZ FX FV FT FD

CJ2

Bore size (mm) 6 10 16 Z T S NB NA NN MM H GB GA FZ FY FX FT FC FB F D C B A 77 3 49 7 16 M6 x 1.0 M3 x 0.5 28 14.5 32 14 24 1.6 4.5 13 8 3 14 12 15 74 46 9.5 12.5 M8 x 1.0 M4 x 0.7 28 5 8 32 14 24 1.6 4.5 13 8 4 14 12 15 75 47 9.5 12.5 M10 x 1.0 M5 x 0.8 28 5 8 42 20 33 2.3 5.5 19 8 5 20 18.3 15 With Air Cushion/Dimensions other than the table below are the same as the table above.

CM2

Rod Series CM2 20, 25, 32, 40 How to Order Mounting style Piping Screw-in type Built-in One-touch fittinges Head side trunnion style Clevis integrated style Boss-cut basic style Nil F B L F G C D U Basic style Axial foot style T E BZ Air-hydro cylinder: Screw-in type only Rod side flange style Head side flange style Single clevis style Double clevis style Boss-cut rod side flange style FZ

CLQ

FX B 71 78.5 19.5 22.5 61 68.5 A A B 29.5 32.5 5 to 50 5 to 50 20 25 Bore size (mm) FV G FX FZ L L1 S L1 Rod end nut 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 20 25 Rear flange type: CLQG/CDLQG FV S Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) 2-6.6 A + Stroke B + Stroke L G 8 FZ FX B A A B 5 to 50 5 to 50 29.5 32.5 69 76.5 19.5 22.5 59

CM2

Mounting LBoss-cut basic (BZ) LBoss-cut trunnion (UZ) LBoss-cut flange (FZ) Caution q Be careful with the snap ring that could fly out. When replacing the rod seal, be careful with the removal of the snap ring, as the snap ring could fly out. w Do not touch the cylinder during operation.

Proposals for Energy Saving

Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 to 1000 to 1000 to 1000 Rear flange type (G) 4FD FY B FT FX ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 190 211 237 to 1000 to 1000 to 1000 6 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ

Plate Cylinder

FX FT FZ (mm) FT 8 8 9 12 14 FV 76 94 118 144 168 FX 14 16 18 22 30 FY 66 82 102 126 148 FZ 24 28 32 39 50 ZZ 99 106 114 139 145 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Flange bracket material: Carbon steel Surface treatment: Nickel plated Single clevis Double clevis Single clevis Double clevis Q + Stroke H10 CD L (mm) RR Z + Stroke CDH10 CX

Compact Cylinder with Lock Series CLQ

B + Stroke G L B 71 78.5 19.5 22.5 61 68.5 A A B A + Stroke 20 25 29.5 32.5 5 to 50 5 to 50 CLS Bore size (mm) CLQ FV G FX FZ L L1 S Rod end nut 20 25 L1 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 RLQ MLU Head side flange style: CLQG/CDLQG MLGP ML1C FV S S Head Side Flange Style (mm) Stroke range Without auto switch With auto switch Bore size (mm) FX FZ 2 x 6.6 8 B + Stroke G L

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer