Compact Cylinder

(mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E H J K L M N A B F 5.5 P M5 x 0.8 Q 11.5 A B F P Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 33 7.5 1/8 10.5 13 16 45 M8 x 1.25 4.5 14 7 34 5.5 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 46.5 39.5 8 1/8 11 13 16 52 M8 x 1.25 5 14 7 40 5.5 8 1/8 11 50 48.5 40.5 10.5 1/4

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Rotary Actuator/Vane Type

B port (40) A port * For size 40 actuators, a parallel key will be used instead of chamfer.

Table of Contents

(VX31, 32, 33) 20 Model Minimum AC/DC Ambient temperature (C ) 40 10 Operating fluid temperature (C ) Temperature conditions Power source Sketch Air Vacuum 60 10 40 AC/DC Maximum AC/DC 20 Minimum Position ON X X P A P A X OFF X X A R (VP) A R X ON X X A R (VP) X A R OFF X X P A X P A ON Pq A A Pq Pq A Pq A A Pq OFF Pw A A Pw Pw A A Pw Pw A Note 1) An exclusive type set with

Table of Contents

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Table of Contents

W K HT HB HC N X A 2-Plug 4-Counterbore dia.

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Air Cylinder Series CA2

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Table of Contents

B C D J K Y A J K B Y C D Misc.

Table of Contents

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

Table of Contents

(mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145

Table of Contents

to 100 5 to 395 Part no.: MGPA20-39 A spacer 1 mm in width is installed in a MGPA20-40.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Rotary Actuator

Size 40 L L 2 K G1 0 0.030 F D B 4 K N V1 Body (B) T V2 M S Body (A) h Key dimensions L1 b C G2 J F h (h9) L1 b (h9) Model L 2 x R A CRB2B;40 4 0 0.030 4 0 20 E 0.030 CRB2B=10-=S CRB2B==-=SE/DE A port B port N W 2 x R 2 x M3 x 0.5 (Depth 4) Size 10 only (for mounting unit) Y X (mm) Q Model A B C D G1 G2 J K L M N P &Q1 E(g7) F(h9)

AW

26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

25 30 40 11 7 240.5 5.5 36 16 8 245.5 9.5 7 47 34 270.5 39 275.5 30 P P1 Nil Rc 1/8 TN NPT 1/8 TF G 1/8 40 18 8 245.5 11 9 47 39 275.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1286 K series Pin Clamp Cylinder Series CKQ K/CLKQ K G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch K C 50 177 R A L P4DWSC C KQG Built-in strong magnet With magnetic field resistant