Cooling Capacity: 25kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: -

1

32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CQ2AH 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 6-17-31 27 Made to Order Common Specifications: Long Stroke Made to Order Common

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Safety Speed Control Valve (SSC Valve) Series ASS

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

MGC

for 20, 50% for 32, 55% for 40 and 60% or less for 50, respectively.)

MLGC

D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Cooling Capacity: 250 (25 kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AK (A + K)

Cooling Capacity: 250 (25 kW), Thread: Rc, Option: AK (A + K)

Cooling Capacity: 25 kW, Thread: NPT, w/Rc-NPT Conversion Fitting, Option: A + K