Smooth Cylinder/Low Speed Cylinder

Standard stroke (mm) Bore size 12, 16 20, 25 Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

0.4

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Hydraulic

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

Refrigerated Air Dryers Series IDF/IDU

AFF37B-14 AM650-14 37 176.5 300 AMH650-14 AMD650-14 AME650-14 AMF650-14 A B AT55C-20 IDFB55E HAW75-20 AFF75 -20 AM850-20 55 264.7 450 AMH850-20 AMD850-20 AME850-20 AMF850-20 A B AT75C-20 IDFB75E AFF75 -20 AM850-20 HAW110-30 75 353.0 600 AMH850-20 AMD850-20 AME850-20 AMF850-20 For screw compressors (when an aftercooler is installed) Air compressor Local line Sub line Main line Note 2) Air

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

Made to Order

239 K 20 P 90 Q 520 S 227 SS 279 Z 506 ZZ 534 CXWM20-225 CXWM20-250 CXWM20-275 CXWM20-300 107 264 20 90 570 252 304 556 584 119.5 289 20 90 620 277 329 606 634 132 314 20 90 670 302 354 656 684 Model F 38 L 240 K 28 P 220 Q 543 S 227 SS 296 Z 523 ZZ 563 CXWM32-225 CXWM32-250 38 265 28 245 593 252 321 573 613 CXWL series: 16, 25 (mm) Model F 115.5 L 239 K 41 P 90 Q 560 S 227 SS 321 Z 548

NCM

7/16-20 No.10-32 No.10-32 075 (3/4"), 088 (7/8"), 106 (1-1/16"), 125 (1-1/4"), 150 (1-1/2"), 200 (2") ZB + Stroke Y W 0.50 K E NE A ZC ZD MM N NC B Pilot NN-Mounting Nut (incl. except 2" bore) ZD D-Across Flats KK-UNF-2A (inch) MM 0.250 0.250 0.312 0.437 0.437 0.625 KK 1/4-28 1/4-28 5/16-24 7/16-20 7/16-20 1/2-20 A 0.50 0.50 0.50 0.75 0.75 0.88 B 0.624 0.624 0.624 0.749 0.749 1.375 D 0.25

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

Magnetically Coupled Rodless Cylinder

$2 are for 20 to 40.

5

(mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN 20 18 15.5 13 8 20 12 8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

OUT) port B A B 2 x Port size 1(IN), 2(OUT) port WN: M12 connector D F K C J E IN A B 2 x Port size 1(IN), 2(OUT) port [mm] Size Port size A B C D E F Glossary of Terms 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/4 47.9 55.3 67 47.9 31.3 46.7 41.1

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

Table of Contents

(The SI unit type is provided for use in Japan.) 20 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option (3) Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) to 40(K) Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.