CV/MVGQ

of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) HX H FZ FY FX FT FC F D C B NA NN A MM NB Z Z S Z S Z S S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 32 14 24 1.6 4.5 84 8 72 4 60 52.5 14 12 M8 x 1 15 M4 x 0.7 9.5 34.5 12.5 28 42 20 33 2.3 5.5 85 8 73 5 61 20 52.5 18 M10 x 1 15 M5 x 0.8 9.5 40.5 12.5 10-15-14 15 Valve

MTS

load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Caution 1.

Compact

ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1

5

st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 65 st or more D-B5/B6/G5/K5 D-G5mW/K59W D-G59F/G5NT 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion type is not available for 80 and 100.

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Smooth Cylinder/Low Speed Cylinder

75 st or more D-B59W 15 st or more 20 to 74st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion style is not available for bore sizes 80 and 100.

15

(No condensation) 11LEFS Sliding bearing LEYGlM 0.29 + (2.20 x 103) x [ST]: 185 st or less 0.34 + (1.92 x 103) x [ST]: Over 185 st 0.48 + (2.91 x 103) x [ST]: 180 st or less 0.55 + (2.62 x 103) x [ST]: Over 180 st Other specifications Actuation unit weight [kg] (*[ST]: Stroke) 11LEJS Ball bushing bearing LEYGlL 0.33 + (1.69 x 103) x [ST]: 110 st or less 0.36 + (1.80 x 103) x [ST]: Over 110

NCQ8

K 2 sides x 4 places O-counter bore R depth M1 E 0.13 + Stroke A + Stroke (Inch) C A Symbol Bore 3/8" to 2"st 1/8"st 1/4"st 1-1/4" to 2"st 1/8" to 1"st W Z R Q P O N M2 M1 K J I H E D 150 (1-1/2") 200 (2") 250 (2-1/2") 2.19 0.56 0.63 0.50 0.70 2.00 2.00 1.38 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 NPT1/8 2.73 0.56 0.75 0.44 0.70 2.06 2.53 1.44 1/2-20UNF 3.13 0.20 0.63 1.90

MGG

32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30 40 50 Allowable

MGC

Rc 1/8 20 40.5 70 73 162 25 58 241 14 104 26 55 M8 x 1.25 Rc 1/4 Bracket Mounting Stroke Long Stroke Without Rear Plate Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 250 to 400 88 14 119 125 st or more 350 to 500 88 14 131 150 st or more 350 to 600 90 14 136 200 st or more 350 to 800

Guide Cylinder Series MGG

20MGGL 25MGGL 32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/1278 Dual rod cylinder/Compact type CXSJ 2122CXSJ/ 1112Dimensions / 10 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

ISO Cylinder

51 to 100 st 101 to 150 st Auto switch model Bore size A dimensions B 5 to 50 st 51 to 100 st 101 to 150 st 8 18.5 18.5 18.5 6.5 10 16.5 16.5 16.5 6.5 12 18 18 18 7.5 8 17 17 17 5 10 15 15 15 5 12 16.5 16.5 16.5 6 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5) 60.5

Slider Type/Ball Bushing Bearing

Horizontal Operation (Floor mounting) Calculation Formula for ( 1) Maximum Load Mass (Center of slide block) (kg) ST: Stroke (mm) Bore size (mm) 6 10 15 20 25 32 40 CY1L6 CY1L10 CY1L15 Model Max. load mass (kg) 1.8 3 7 12 20 30 50 10 (0.86 1.3 x 103 x ST) 3 10 (1.5 1.3 x 103 x ST) = Stroke (Max) Up to 300 st Up to 300 st Up to 500 st Up to 500 st Up to 500 st Up to 600 st Up to 600 st

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0:

EXxx-OMN0029CN

ST () LED PLC H.T.ON/OFF DXE DXF ST () LED PLC ON/OFF ST / (60 ) -36No.EX-OMN0029CN-D EX600No. H.T. () LED PLC H.T. ON/OFF LED PLC () ON/OFF DYB / 3 H.T. ST () LED PLC H.T. ON/OFF LED PLC DYE DYF ST () ON/OFF ST / H.T. ST(I) () LED PLC H.T.ON/OFF ST(I) () LED PLC ON/OFF H.T. ST(0) () LED PLC 4 DME DMF H.T.

EXxx-OMQ0015CN

ST () LED PLC DXE DXF H.T.ON/OFF ST () LED PLC ON/OFF ST / : (66 ) -28No.EX-OMQ0015CN EX600No. LED PLC H.T. () H.T. ON/OFF LED PLC () ON/OFF DYB / 3 LED PLC H.T. ST () LED PLC H.T. ON/OFF DYE DYF ST () ON/OFF ST / LED PLC H.T. ST(I) () LED PLC H.T. ON/OFF ST(I) () ON/OFF LED PLC H.T. ST(O) () 4 DME DMF H.T.

51

st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more Other than the applicable auto switches listed in How to Order, the following auto switches are mountable.

CXS

/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100 st 1 CXSM CXSL Weight m (kg) 32 0.1 25 20 15 0.01 0 20 40 60 80 100 Overhang l (mm) 8-28-14 14 Series CXS Model

CXS

10 st Graph (7) V = Up to 1000 mm/s; Up to 10 st 3 3 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 MX 25 25 MTS 0.1 0.1 20 20 0 0.06 MY 0 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) CY Graph (8) V = Up to 800 mm/s; Up to 30 st Graph (9) V = Up to 1000 mm/s; Up to 30 st MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370