Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .

Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .

IZx-OMT0049

) Note 40) Note 40) Note 40) ION BALANCE OFF ON Display Ions are generated (green) Note 40) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 45) Note 44) Note 42) Note 43) Note 44) Note 44) OFF ON Product type IZTP41(green) IZTP42(blue) DAC/AC OFF ON Maintenance (green) NDL Note 47) Note 47) Note 47) Note 47) OFF ON Built-in sensor (green) SNSR Note 48) Note 48) Note 48

Vacuum Regulator

Description Phillips Screw Tightening Torque 1 2 Gauge nut O-ring For IRV10(A): M3 For IRV20(A): M4 0.32 0.03 Nm 0.76 0.05 Nm Rc1/8 8 Vacuum Regulator Series IRV10/20 Pressure Gauge for Vacuum GZ43-K-01 IRV20 GZ33-K-01 IRV10 Part no.

HRX-OM-W032

(In case of without K option, circulating fluid can be filled manually removing the side panel.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

Miniature Regulator Series ARJ210

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

DOC1001322

/Japanese 1 pc.) (2) Y strainer (40 mesh) 25A 1 pc. (3) Barrel nipple 25A 1 pc. For HRS400-AF-46G thread adapter set 1 set (4) For HRS400-AN-46NPT thread adapter set 1 set (5) Anchor brackets 1 2 pcs. (M8 bolts) 6 pcs. (6) For option D. DI Filter 1 pc. attached. The bolts (M8) used for fixing to the skid are not anchor bolts.

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

IZx-OMX0087

Minimum bending radius: Power supply cable: 40 mm (IZT43) Power supply cable: 48 mm (IZT43-L) Communication cable: 40 mm (IZT43-L) Separate cable: 40 mm High voltage cable: 30 mm Separate cable is optional. 1) Power supply cable For IZT43-L, refer to the IO-Link dedicated instruction manual.

3

N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead wire and M8 connector ZS-40-A Cable Specifications 2 (White) (Black) 4

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

Flow Sensor Series PFMV

P2: Nozzle internal pressure P1: Atmospheric pressure Nozzle Diameter Flow Characteristics (Vacuum) Nozzle Diameter Flow Characteristics (Positive pressure) 5.0 5.0 0.6 0.5 4.5 4.5 4.0 4.0 0.4 3.5 3.5 0.6 Flow rate [l/min] Flow rate [l/min] 3.0 3.0 0.3 2.5 2.5 0.5 2.0 2.0 1.5 1.5 0.4 0.2 1.0 1.0 0.3 0.5 0.5 0.1 0.2 0.1 0.0 0.0 80 60 40 20 0 0 50 100 150 200 250 300 P2 [kPa] P2 [kPa] Example

Regulator for 2 MPa Series ARX20

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

AWM20 to AWM40

AWD30, 40 w w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

AWM20 to AWM40

AWD30, 40 w w t t q q IN OUT IN OUT e y y e r u r u Drain Drain Component Parts No.

ALF400 to 900, ALT-5/-9

VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L