Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz), Option: -

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz))

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Table of Contents

(mm) W White R Red H Black (B) White (W) BU Blue Tubing model Y Yellow Blue (BU) Red (R) D G Green C Clear Yellow (Y) Green (G) Clear (C) Orange (YR) MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YR Orange T Length per roll VMG 20 20 m roll Fluid Air/Water Max

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(Response time selections with anti-chattering function: 20 ms, 160 ms, 640 ms, 1000 ms, 2000 ms) ZSP Short circuit protection With short circuit protection 0.5%F.S.

V100

MPa 0.3 MPa 0.3 MPa 0.1 MPa 0.3 MPa 0.1 MPa 0.5 W DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

Air Fittings & Tubing

53 34.5 22 MS Note1) D1: max. diameter SKQ12, #18 to #25 Tl 2.1-20 Series KQ2 Extended male elbow: KQ2W A (1) (2) Tube O.D.

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

5 Port Solenoid Valve Series SY3000/5000/7000/9000

= 26n + 172 11 to 20 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 52n + 264 SV Manifold base mass w (g) n: Stations (D-sub connector) SY3000 SYJ SY5000 SZ Note 1)For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

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1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

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2.5 29 Series ZPY /Without Buffer Connection Flat with Connection Port: Barb Fitting Vacuum Entry Horizontal s&20 Flat type Flat type Deep type/ ZPY250 only Width across 1Ia1s.~ ~ Miniature tube Miniature tube w oc-,l-,11>\1\'\ ' fitting (Series MS) \ fitting($eries MS) \ ..

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

LEC-OM02904

PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB19 VRF1 50 Hz PB20 VRF2 50 Hz PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 ( ) PB28 CDT 100 ms PB33 VRF1B 60 Hz PB34 VRF2B 60 Hz (b) OFF OFF ON 63.4 CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000 20 50 20 50 60 50

Auto Switch Guide

2-color indication with diagnostic output Grommet Band 10-20-51 MK(2) Grommet Rail 10-20-52 Grommet Tie-rod 10-20-53 RS Q G Water (coolant) resistant type D-H7BAL D-G5BAL D-F7BAL D-F7BAVL D-F5BAL D-F9BAL D-Y7BAL 10-20-54 RS H A Band Grommet Water resistant 2-color indication 10-20-55 Solid state switch RZQ 10-20-56 Rail Grommet 10-20-57 Tie-rod Grommet MI W S 10-20-58 Direct Grommet CEP1

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Delay Time 1.5 ms1 or less 1 Select from 1.5 ms or less, 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms, or 5000 ms. Convenient Functions p. 17, 26 Functions Copy function Auto-shift function Security code Power saving mode Resolution switch function MPa/kPa switch function 20 20A 20B 20B-L 20C Copy function The settings of the master sensor can be copied to the slave sensors.

CATALOG

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z