Table of Contents

ZF ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZP Manifold ZCU AMJ Misc.

Proposals for Energy Saving

No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.

Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: -

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: -

Cooling Method: Air-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: -

Cooling Method: Water-cooled Refrigeration, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: -

Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: -

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Compact Manometer Series PPA 1

MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L. AV LOCK MODE(AUTO POWER OFF CANCEL) PPA100 AU LIGHT POWER AF BATTERY 1.5 Vx2 LR6, R6P MADE IN JAPAN AX AR X Refer to Note) LIGHT POWER Body IR Span calibration 110 VEX 180 + AMR + ITV Type AA dry batteries (2 pcs.)

Compact Manometer Series PPA 1

MPa POWER LIGHT MPa POWER LIGHT 14-12-6 7 Compact Manometer Series PPA Dimensions Connecting tube port 40 20 Accessory One-touch fitting F.R.L.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

HRX-OM-X071

For HRR050-AF-20/40G thread adapter set 1 set For HRR050-AN-20/40NPT thread adapter set 1 set 1 In the case of option Z, not included.

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

PA3000/5000/PAX1000

FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Discharge port (FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.