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x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Aluminum High Vacuum Angle Valve

How to Order q w e r t y u XLA M9N 16 A XLA q Flange size Size w Flange type e Indicator/Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63, 80 63, 80, 100, 160 Symbol Nil D Symbol Nil A F G J K L M Pilot port direction Indicator Without indicator Right flange surface Left flange surface 16 25 40 50 63 80 100 160 Flange side Flange side Left

Modular F.R.L. Unit

Nil Rc N Note 1) NPT Optional specifications F Note 2) G Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Description 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Drain guide 1/4 Non-relieving type Flow direction: Right to left Drain cock with

ISO Cylinder

32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data

Modular F.R.L. Unit

w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

5

WA B C B1 REC A K N Smooth Smooth ZZ + Stroke S + Stroke N F M H Low Speed (mm) MQ Bore size (mm) A AL B B1 C D E F G H H1 J K KA RHC 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75

LJ1H

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

CA2

Bore size (mm) Effective thread length Width across flats A D H K MM W ZZ 40 50 63 80 100 32 37 37 37 47 18 22 22 26 31 35 40 40 40 50 20 25 25 30 36 58 71 71 72 85 7 11 11 11 15 M18 x 1.5 9 9 9 0 0 153 172 183 205 228 M22 x 1.5 M22 x 1.5 M26 x 1.5 A B M30 x 1.5 With heavy duty scraper -XC4 Heat resistant (150C) -XB6 4 2 The cylinder seals are changed to a heat resistance (to 150C) material

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Series CRBU2 Size: 10, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

counterbore (Port size) Rod end male thread Rod end nut Rod End Male Thread Bore size (mm) 32 40 50 X H1 L1 C1 20.5 20.5 26 23.5 23.5 28.5 M14 x 1.5 M14 x 1.5 M18 x 1.5 28.5 28.5 33.5 Basic Style A B Bore size (mm) 32 40 50 C D E F H I J K L M N O P Q W Z 10 st 40 46.5 48.5 20 st 58.5 5 st 28 34.5 10 st 33 39.5 40.5 20 st 50.5 5 st 35 41.5 13 13 15 16 16 20 45 52 64 8.5 8.5 11 M8 x

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0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC L N 40 100 JN 1 W D CVS1 Without auto switch MK(2) 100 Y7BW L N 40 JN 1 W D CDVS1 With auto switch RS Q G Suffix for cylinder RS H A Built-in magnet J K N R H Nil Nylon tarpaulin Heat resistant tarpaulin

AC

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

CL

236 30 35 35 40 40 50 50 56 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52 59 59 59 43 43 43 9.0 9.0 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 Bore (mm) W/o rod boot W/ rod boot KA N H1 K MM GA FV J W M S M1 P GC GB e 36 45 45