NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

an option.

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

Table of Contents

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

NPT1/2 C J E IN A 2 x Port size 1(IN), 2(OUT) port B [mm] Size Port size A B C D E F 20 1/4 28.1 40 69 36 12.5 18 3/8 48 G3/8 72 14 30 1/4 28.1 40 78 42 12.5 21 3/8 48 G3/8 81 14 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/4 39 28.5 44.8 38 46.4 48.9 3/8 G3/8 42 47.8 49.4 30 1/4 40 31.1 45.8 41 47.4 51.9 3/8 G3/8 43 48.8 50.4 17 Direct Operated 2-Port Solenoid Valve

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !

Parallel Style Air Gripper Series MHZ

If the workpiece gripping point goes beyond the range limits, this will have an adverse effect on the life of the air gripper. 0.3 MPa 40 20 0.4 MPa 0.5 MPa 20 10 0 10 20 30 40 50 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) MHZ2-16/11-MHZ2-16 MHZ2-40 120 Pressure 0.2 MPa 60 100 50 Overhang H (mm) Pressure 0.2 MPa 80 0.3 MPa 40 0.4 MPa 60 0.6 MPa 0.5 MPa 30 0.3 MPa 0.7 MPa

Mechanically Jointed Rodless Cylinder Series MY1

Select an applicable one referring to the table below. Nil None With side seal Note) Cylinders with side seal are available for 16 to 40. Nil K 25, 32, 40, 50, 63 Note) S is available when stroke adjusting units are A and L.

CATALOG VC10

(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564

TABLE OF CONTENTS

(G or L) LW53KK8XGB (G or L) 215 215 135 70 55 120 120 10 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564

Modular F.R.L. Units

mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2

Table of Contents

(mm) Size Q1 = M Size Q1 = M 15 20 30 40 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M3 x 0.5 2.5 2.5 2.5 2.5 M4 x 0.7 3.3 3.3 3.3 L1 L1 M4 x 0.7 3.3 3.3 3.3 M5 x 0.8 4.2 4.2 Q1 M5 x 0.8 Q1 4.2 4.2 11-3-29 64 Series CRBU2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type W Standard J K Refer to

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

K Single shaft S Single shaft T Double shaft Y J Y T S K A parallel key is used instead of single flat for size 40.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Size Q1 = M Size Q1 = M 15 20 30 40 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M3 x 0.5 2.5 2.5 2.5 2.5 M4 x 0.7 3.3 3.3 3.3 L1 L1 M4 x 0.7 3.3 3.3 3.3 M5 x 0.8 4.2 4.2 Q1 M5 x 0.8 Q1 4.2 4.2 11-3-29 64 Series CRBU2 (Size: 10, 15, 20, 30, 40) Made to Order Specifications: -XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type W Standard J K Refer to

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Basic type / Direct mount type Series CY3B/CY3R

(cm) : Friction coefficient 210 K 7cos + 2 (4.2 + Lo) sin Angle k to 45 1 to 60 0.9 to 75 0.8 to 90 0.7 32 400 K 8cos + 2 (5.1 + Lo) sin Angle coefficient (k): k = [to 45 (= )] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 6 10 15 20 Bore size (mm) 1.9 + Lo 5.25 2.55 2.2 + Lo 17.5 2.7 + Lo 36 Allowable drive resisting

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Air Cylinder

size A AL B1 B2 D G H H1 I K KA MM N NA NN P Q QY S TD TT TX TY TZ Z ZZ 20 18 15.5 13 26 8 41 5 28 5 6 M8 x 1.25 15 24 M20 x 1.5 1/8 19.8 14 62 8 10 32 32 52 36 103 25 22 19.5 17 32 10 45 6 33.5 5.5 8 M10 x 1.25 15 30 M26 x 1.5 1/8 22 14 62 9 10 40 40 60 40 107 32 22 19.5 17 32 12 9 45 6 37.5 5.5 10 M10 x 1.25 15 34.5 M26 x 1.5 1/8 25.8 16 64 9 10 40 40 60 40 109 40 24 21 22 41 14 10.5

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,