Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: Rc, Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

Type: -, Cooling Method: -, Cooling Capacity: 2,600/3,200 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: None

ARJ1020F

6 t Zinc chromated w Electroless nickel plated Accessory Black zinc chromated Accessory IN 14-4-12 10 Miniature Regulator Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 F.R.L. 31 AV 56 56 AU 35 AF 32 22 M12 x 1 Panel cutout dimensions 12.5/Panel thickness: 4 or less AR 19 2 27 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

CC-Link-E

I f t he secondary si de out put i s rel eased t o t he at m osphere, ai r w i l l keep com i ng out . H andl e w i t h care. I f t he pressure suppl y i s cut w hi l e pow er i s suppl i ed, t he bui l t i n sol enoi d val ve w i l l keep operat i ng and m ay m ake a buzzi ng noi se. Thi s m ay af f ect t he l i f e of t he sol enoi d val ve.

AW20-B to AW60-B

Note 16) Drain cock with barb fitting 87 Filter Regulator Series AW20-B to AW60-B Filter Regulator with Backflow Function Series AW20K-B to AW60K-B AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AW20-B, AW20K-B AW40-B, AW40K-B q Body size 20 30 40 60 Symbol Description g Exhaust mechanism Nil Relieving type N Non-relieving type + Semi-standard h Flow direction

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 706 Direct Operated Precision Regulator/Modular Type Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR IRV w w VEX SRH Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Assembly of check valve body assembly, check valve cover and 2 screws 764 Direct Operated Precision Regulator/Modular Type ARP20/30/40 Series Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A ARJ AR425 to 935 ARX 1 I N 2 OUT AMR C SM ARM ARP ARP A IR-A IR w w IRV VEX Inlet pressure (IN side) Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

VER2000/4000

6 q w e r t y u i Block packing !

Table of Contents

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Proposals for Energy Saving

Solenoid specifications Apparent power VA Inrush Energized Power consumption W (energized) Temperature increase C (rated voltage) 8 6.5 8 11 9.5 11.5 Symbol Frequency Hz 50 66 (60) 20 60 57 (51) 15 50 93 25 60 79 20 Model Power supply 55 45 50 60 50 55 OUT AC VXZ22 DC AC IN VXZ23 DC Note 1) Reset voltage is 20% or more of rated voltage for AC, and 5% or more of rated voltage for DC.

HRX-OM-R026

. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4 Cooling capacity . 9-10 HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Lubricator Series AL10 to 60

Drip failure can cause damage to the components that need lubrication. 14-2-62 Lubricator Series AL10 to 60 Construction AL10 AL20 JIS Symbol w w e q q t IN OUT IN OUT F.R.L. y y AV r u u AU AF AR AL30/40 AL50/60 IR w w q t VEX q e e t AMR IN OUT OUT IN ITV y r IC i r u VBA VE VY1 y G u PPA AL Component Parts Description Material Note No.