Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + T

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: J + M

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: J + M + T

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J + M + T

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: T (High-pressure Pump Mounted)

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: NPT with PT-NPT Conversion Fitting Set, Option: High-pressure Pump Mounted

1

) w Type t SUP/EXH block assembly 20 20 stations 10 11 Side ported Bottom ported Note 1) Double wiring: 2-position single, double, 3-position and 4-position valves can be used on all manifold stations.

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 20 Name: Encoder normal communication error 1 Alarm content An error occurred in the communication between an encoder and driver. Detail No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

TROUBLESHOOTING Alarm No.: 20 Name: Encoder normal communication error 1 Alarm content An error occurred in the communication between an encoder and driver. Detail No.

Table of Contents

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Table of Contents

7 t CY3R15/20 CY3R15 Component Parts No. Description No.

Table of Contents

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

LECSS 2-T device caused it. It has no failure. Check it with the check method for [AL. 45.1]. 32.2 Overcurrent detected at software detection function (during operation) (1) The servo gain is high. Check if an oscillation is occurring. An oscillation is occurring. Reduce the speed loop gain ([Pr. PB09]). LECSS 2-T An oscillation is not occurring.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

5-Port Solenoid Valve

(2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) Symbol Stations Note 02 2 stations Double wiring*1 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) w Type t SUP/EXH block assembly 20 20 stations 10 Side ported 11 Bottom ported*1 *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all