Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: F (G with PT-G conversion Fitting Set), Option: None

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: T (High-lift Pump)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: BT (B + T)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: MT (M + T)

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: With earth leakage circuit breaker / High pump head specification

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: High pump head specification

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M + T

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: G with PT-G conversion Fitting Set, Option: None

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Cassette base 1OS EM D W SSsV W 165 -In",o"u," set Valvestations B E port position 2 stalions Note 1) Doube wiring speciiication I stalions 2 siaiions Specitied tayoul (Up lo 16 solonoids possible ) 16 slations U side (2 to 10 slations) D side (2 to l0 slalions) Both s des (2lo 16 statpns) Supply/Exhaust block assembly specification Nole 1l Doube wn.g specilicalon Shgle doubeafdlJ poston

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AR20K to 40K Note 1 ) SEckel 6semb y is not molnted al the line or sh pmenl, bul alher packaged togelher w lh lh regulalor Note 2) Mounhg lhre2ds lDr prsu.e gauge AF 10-1/16; AF2o to 30 1/8i AF40 1o 6o-t/4 PlKUe gauge s nol mounled atlhelime oj shipmenl, bu Elher packaged lotFtherwhlhe egllator a a a a a a a o a a a a a a a a a a a a a a a a a a o a a a a a a AW With digital pressure switch

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

ZQ-OM01301

ZQ-OM01301-A Vacuum Ejector System (with energy saving function) Model of a single unit ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8)(9) (6) Lead wire specifications (1) Nozzle nominal size Nil No lead wire with connector 05 0.5 W Lead wire for energy saving switch 07 0.7 (2 m, included in the package) 10 1.0 (2) Body type (7) Fitting (V port) (8) Fitting (P port) Symbol

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Lubricator Series AL10 to 60

Drip failure can cause damage to the components that need lubrication. 14-2-62 Lubricator Series AL10 to 60 Construction AL10 AL20 JIS Symbol w w e q q t IN OUT IN OUT F.R.L. y y AV r u u AU AF AR AL30/40 AL50/60 IR w w q t VEX q e e t AMR IN OUT OUT IN ITV y r IC i r u VBA VE VY1 y G u PPA AL Component Parts Description Material Note No.

VER2000/4000

6 q w e r t y u i Block packing !

AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

Table of Contents

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.