Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y
Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y
stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.
21 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 7 10 14.6 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 0.5 0.3 0.5 0.3 0.5 0.3 0.5 0.3 IY-G012 5 5 8 10 10 14 18 22 5 5 8 10 10 14 18 22 12 16 20 25 32, 40 50, 63 80 100 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 10 12 16 20 22 28 38 44 +0.048 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070
across flats 7 Fluoro rubber 26.5 42.5 14 2.5 55 120 50 14.5 27 43 55.5 120.5 2 20 15.5 End pin Conductive fluoro rubber Dimensions for other strokes 12 Conductive fluoro rubber Stroke 20mm 30mm 50mm Y I G +10 +20 +40 H +4 +14 +59 0 1.6 Model INO-3769-2478-06U INO-3769-2478-08U A 6 8 Y 0.8 1 B 7 9 A +25 B Add an appropriate value from the 10mm stroke dimensions table. 149 &RXUWHV\RI6WHYHQ
Hundredths Of An Inch Stroke Special Rod Trunnion Location NC A1T (150 ~ 400) * X46US * (in) Z RANGE MIN MAX Bore (in) MM KK A AA B BA C D DD E EA EE G J R TL TM TT UM UV WF Y P LF XI ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 1 2.5 1.18 4.5 2 1 1.71 2.36 3 5/8 2.89 4 3/4 2.87 2.92+stroke 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24
36 (45) (37) (4.9) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) (36.7) (40.2) 12.7 20.5 40.4 15 0.8 (20) 28.1 [35.1] + 1.6 (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector (L): M plug connector (M): DIN terminal (D, Y): M8 connector (WO): 10-SY5 20-L(-F2) 3 4 5 10-SY5 20-M(-F2) 3 4 5 10-SY5 20(-F2) 3 4 5 10-SY5 20-WO(-F2) 3 4 5
YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.
Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used
Size Foot bracket Mounting screws included in foot bracket 30 CRA1L30-Y-1 M5 x 0.8 x 25 50 CRA1L50-Y-1 M8 x 1.25 x 35 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw.
to 400 161.6 124 LH LT 20 to 100 155.7 114 32 19.2 6.6 4 11.3 101 to 500 185.7 144 4 x LD LX X X Y Y Stroke range (mm) LZ LS + Stroke LH LT LX LY LZ X Y Size A + Stroke 10 to 100 16 24 2.3 48 40.3 62 9.2 5.8 Special cap bolt 101 to 300 Outward mounting 15 to 100 25 30 2.6 57 51.5 71 11.2 5.8 101 to 400 20 to 100 32 36 3.2 76 61.5 90 11.2 7 101 to 500 Material: Carbon steel (Chromated) The
y y e e r r r u u u Drain Drain Drain Component Parts Material No.
YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
X-axis Y-axis Z-axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3 Calculation of Load Factor for Static Load m1: Weight m1 m1 max (from q of graph MY3A m1) = 10.7 (kg) Load factor 1 = m1 m1 max = 0.8 10.7 = 0.08 X M1: Moment M1 max (from w of graph MY3A M1) = 4 (Nm) m1 M1 = m1 x g x X = 0.8 x 9.8 x 5 x 10-3 = 0.04 (Nm) M1 Load factor 2 = M1 M1 max = 0.04 4 = 0.01 M2: Moment Y M2 max (from
EMO circuit An EMO (EMergency Off) circuit is an electrical circuit provided to shut off all power and ensure safe conditions when an emergency stop button (EMO button) is pressed in an emergency. Hardware interlock This is an equipment control circuit for shutting off power in case of trouble.
2-KK UNF-2A 2-D Across Flats (inch) MM 0.250 0.250 0.312 0.437 0.437 0.625 KK 1/4-28 1/4-28 5/16-24 7/16-20 7/16-20 1/2-20 A 0.50 0.50 0.50 0.75 0.75 0.88 B 0.624 0.624 0.624 0.749 0.749 1.375 D 0.25 0.38 0.38 0.50 E 0.86 0.93 1.12 1.32 1.56 2.06 K 0.12 0.25 0.25 0.38 N 0.75 0.75 0.88 1.06 1.25 1.75 NN 5/8-18 5/8-18 5/8-18 3/4-16 3/4-16 1-1/4-12 W 0.50 0.50 0.62 0.88 0.88 1.19 Y 0.95
If it is equipped with an auto drain, check its operation once a day. yWhen the hydraulic pressure of an air-hydro unit must be raised. uWhen the pressure must be raised in an explosion-proof environment. iTo boost the pressure by remote operation, using an air operated type. rExhaust air After operating this product for an extended time in the set state, if the booster valve is switched,
VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3 x 10 With spring washer Adapter plate Note) Please contact SMC when using an individual EXH spacer assembly, an individual or an adapter plate assembly on VV5Z5-21P .
20 30 30 32 28 28 40 60 60 64 Y-04MNote 1) 50 12.5 Y-05MNote 1) 64 16.5 Y-08MNote 1) 80 23.5 Y-10MNote 1) 80 23.5 Y-12MNote 2) 119 28.5 Note 1) A pin, cotter pin and a flat washer are equipped as standard.