Valve Single Unit

) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Fieldbus System

How to Order Valves (With mounting screw) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

Step Motor Controller

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Smooth Cylinder/Low Speed Cylinder

REA CDU Double Acting, Single Rod (mm) W B A W B D-M9A D-M9AV D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) REB A B W A B W A B W A 10 16 20 25 32 12.5 3.5 (-1.5)1 16.5 7.5 2.5 16.5 7.5 0.5 16.5 7.5 4.5 16.5 7.5 2.5 REC (-2)0.5 16 4 20 8 1.5 20 8 -0.5 20 8 3.5 20 8 1.5 (-4)-1.5 20 6 24 10 0 24 10 -2 24 10 2 24 10 0 CY (-5.5)-3 22.5 7 26.5 11 -1.5 26.5 11 -3.5 26.5 11 0.5 26.5 11 -1.5

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver's output terminals U, V, W do not match servo motor's input terminals U, V, W. 9. SSCNET cable fault Change the SSCNET cable. 10.

Fieldbus System

Ported Type 11 Bottom Ported RoHS How to Order Manifold SS5Y S 10 3 NA C6 N 05 U Refer to page 11 for Type 11/Bottom ported dimensions. q r w t e y u i o q Series y P, E port entry t Valve stations 3 5 U D B In the case of the 32-output SI unit SY3000 SY5000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Symbol 02 Stations Note 2 stations w Type Double

Battery-less

4 u u !2 !3 i e !5 r t w q y !6 !

Electric Actuator

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).

5 Port Solenoid Valve

7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25C O.D. 1.4 !9 y t @0 u Lead wire colors for circular connector cable assembly terminal numbers Approx. 10 Terminal no.

Series SV

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base SS5V W D 05 16S 1 A1W U DIN rail length Enclosure IP67 specification 1 2 SV1000 SV2000 Series Standard length Nil 3 Specify a rail longer than the standard length.

REA/REB

W (kg) REAR20 10 REAR15 REAR10 1 0.5 100 200 300 Maximum speed U (mm/s) 12 Series REAR Model Selection 3 Max.

JXCx-OMT0023

Connection of driver and servo motor The servo motor power supply terminals (U, V, W) of the driver should match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

10

S Conduit 24 VDC C37 5 With surge voltage suppressor 3/8 8 T 100 VAC 10 (N.C. only) U 110 VAC 1/2 10 (N.C. only) V 200 VAC 5 W 230 VAC 1/4 8 10 (N.C. only) Flat terminal Stainless steel 5 Y 3/8 24 VDC 8 10 (N.C. only) 1/2 10 (N.C. only) Z Other voltages For special options, refer to pages 21 to 23.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !