Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

Table of Contents

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

Base Mounted Metal Seal/Rubber Seal Series VQ

The manifold with an vacuum ejector unit type is mounted from the U side. One vacuum ejector unit corresponds to one station.

NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Compact 5-Port Solenoid Valve

For models without an SI unit (S0), note the number of output points of the SI unit that will be mounted. u P, E port entry, SUP/EXH block assembly Symbol P , E port entry SUP/EXH block assembly Application U U side (2 to 10 stations) Internal pilot All D D side (2 to 10 stations) B Both sides (2 to 24 stations) US U side (2 to 10 stations) Internal pilot, Built-in silencer D-sub connector

Compact Cylinder

28 36 38 43.5 48.5 57 65.5 U 21.5 22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 12 16 20 25 32 40 50 63 80 100 The applicable

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

20 24.5 18.5 21.5 20 23 24 27 23 26 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-F9WV D-A73C D-A80C D-A7 D-A80 D-F9BAL D-P5DWL Bore size (mm) U U U U U U U U U U 12 22 23 26 20.5 26.5 19.5 16 25 29 23.5 29.5 26 22.5 20 31 27 31.5 28 24.5 25.5 25 30 34.5 31 34 28.5 27.5 32 26.5 29 34 27 35 38

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

AC Servo Motor Driver

50 20 50 8 16 8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

0.4

L kit <u SUP/EXH block assembly>

V100

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

Compact Hydraulic Cylinder

1 u t w y o !2 Bore size 20 Bore sizes 20 & 25 CHQ CHKm CHN CHM CHSm CH2m Description Material Note Parts List No.

Electric Actuator

to 100 25 92 1 26.5 40 87 120 14.1 123.9 156.9 15.8 82.4 115.4 14.1 123.5 156.5 15.8 105 to 400 20 to 100 32 118 1 34 60 88.2 128.2 17.1 116.8 156.8 17.1 76.6 116.6 17.1 116.1 156.1 17.1 105 to 500 Motor left side parallel type/LEY L 25 32 Motor right side parallel type/LEY R 25 32 U S1 U S1 [mm] T2 T2 S1 T2 U Size 25 32 47 91 1 61 117 1 Note) When the motor is mounted on the left or right

CQ2

U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 U 27 30.5 36.5 40 U 29 32.5 38.5 42 U 26.5 30 36 39.5 2.3-62 Series CQ2K 12 to 25 Without Auto Switch 12, 16 Standard (Through-hole)/CQ2KB 20, 25 Rear boss mount (mm) Rear boss mount Bore (mm) 12 16 20 25 G Th9 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Rod end male thread (mm) Rod end male thread Bore (mm) C1 X H1