Series SV U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...
P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.
] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.
Note 10) For an actuator with lock, add the power consumption for the lock.
Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.
25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore size (mm) K MM NA NB NN P RR S T U V W Z ZZ IA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 13.5 81 9.5 14 4.5 6.5 136 149.5 25 25f8 5.5 M10 x 1.25
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32BM ZP3E-80BM 6 20 N, S, F S Displacement [mm] Displacement [mm] 16 4 12 N, U, F U 8 2 CL CL 4 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100BM ZP3E-40BM 8 25 S N, S, F Displacement [mm] Displacement [mm] 20 6 U 15 N, U, F 4 10 CL
U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9 6 6.5 5 35 36 42 38.5 41.5
3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.
Driver's output terminals U, V, W do not match servo motor's input terminals U, V, W. 9. SSCNET cable fault Change the SSCNET cable. 10.
Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.
Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.
Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.
Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).
EX260 Integrated-type (For Output) Serial Transmission System Series 10-SV RoHS How to Order Manifold 10-SS5V 10S1 D N 05 1 U W NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2
Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection
D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.
Note 10) For an actuator with lock, add the power consumption for the lock.
-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35