REA/REB

Maximum load weight W CEP1 1 = W/Wmax = 1/3 = 0.111 = 0.333 Examine W. (For Wmax, find the value in when U = 500 mm/s.) L2 CE1 CE2 L1 ML2B M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] 2. Static moment W Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

REA/REB

Maximum load weight W CEP1 1 = W/Wmax = 1/3 = 0.111 = 0.333 Examine W. (For Wmax, find the value in when U = 500 mm/s.) L2 CE1 CE2 L1 ML2B M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] 2. Static moment W Examine M2. Since M1 & M3 are not generated, investigation is unnecessary.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

Air Cylinder

8 K K i w e y y u !1 !7 !9 !8 CJP CJ2 CJ2 JCM CM2 With auto switch CM3 10, 16 Rubber bumper CG1 K w e u y !0 t r i !6 !5 !1 !7 CG3 JMB MB MB1 With auto switch CA2 10, 16 Air cushion CS1 CS2 w e u y o t !0 r i !6 !5 !1 !3 !4 !2 !7 K With auto switch Component Parts No. Description Material Note 10 Piston seal NBR No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

SX

) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

7.5

1 u !0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

0.4

EX124D-SMJ1] Note 1) U S U S e w AXT100-1-P Note 2) U S U S SYJ AXT100-1-F Note 2) Note 1) Dust-tight, Water-jet-proof (IP65) Note 2) Top entry connector for FU, PU while side entry connector for FS, PS.

Valve Single Unit

) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

EX260 Integrated-type (For Output) Serial Transmission System Series 10-SV RoHS How to Order Manifold 10-SS5V 10S1 D N 05 1 U W NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA 03 YA-03 32, 40 42 6 16 6.8 18 6.5 10 MU YA-05 50, 63 50 8 20 9 20 6.5 12 Applicable air cylinder bore YA-08 80 62 10 25 11 26 8.5 16 D03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 76 12 30 14 31 10.5 18 YA YB YU Type A mounting bracket -X Bore size (mm) U V W Weight (g) Part no.

Valve Single Unit

) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Fieldbus System

How to Order Valves (With mounting screw) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

Step Motor Controller

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Smooth Cylinder/Low Speed Cylinder

REA CDU Double Acting, Single Rod (mm) W B A W B D-M9A D-M9AV D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) REB A B W A B W A B W A 10 16 20 25 32 12.5 3.5 (-1.5)1 16.5 7.5 2.5 16.5 7.5 0.5 16.5 7.5 4.5 16.5 7.5 2.5 REC (-2)0.5 16 4 20 8 1.5 20 8 -0.5 20 8 3.5 20 8 1.5 (-4)-1.5 20 6 24 10 0 24 10 -2 24 10 2 24 10 0 CY (-5.5)-3 22.5 7 26.5 11 -1.5 26.5 11 -3.5 26.5 11 0.5 26.5 11 -1.5