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(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11 FM P (BK) IDF15E1-10 PC CM ILS FM PTC OLR OLR ILS PTC PTC CM C01 C02 PRS PC C01 C02 C11 FM C11 PRS P IDF Series 6-4 6 5 IDX-OM-W011 6 IDF15E1-20 L PE N TB ILS CM FM PTC OLR OLR ILS CM PTC PTC PRS TB C11 C11 FM PRS P IDF Series 6

. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4 Cooling capacity . 9-10 HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

-I ~ ime-sions~m ~-~~~--~-Nose mount: CO JPB u \2~ . c: n p w , ,," B' p I./l,ao~ hab ,/ (' B Rod end without thread w ",. /"(2 " .' ,," / ro~ ~ e ~With , autO sw.itCh Bore size w i (mm) 15S): 20~t ; .

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.

(With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

C Port W W B port C Port D port A port D port 30 20 172 87 35 48 9 21 30 25 177 87 40 48 9 21 30 32 183 91 40 50 9 23 20 40 208 99 50 57 8 24 20 50 241 117 58 64 12 28 20 63 241 117 58 64 12 28 H SA + Stroke SB + Stroke Please contact SMC for long stroke (301 mm or more) since SA-dimensions and ZZ-dimensions are different from those in the above table.

Bore size (mm) 20 Auto switch model Bore size (mm) 25 32 40 Axial foot CM-L020B CM-L032B CM-L040B D-C7/C8 D-H7 D-B5/B6 D-G5NTL CM-F020B CM-F032B CM-F040B Flange BM2-020 BM2-025 BM2-032 BM2-040 CM-C020B CM-C032B CM-C040B Single clevis Double clevis (With pin) CM-D020B CM-D032B CM-D040B BA2-020 BA2-025 BA2-032 BA2-040 CM-T020B CM-T032B CM-T040B Trunnion (With nut) D-A3A/A44A D-G39A/K39A Two

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

0 R/W U8 1 Y 1820 0x071C 0 R/W Line 1 U8 0 Y Line 1 (11seg) 1821 0x071D 0 R/W Line 2 U8 0 Y Line 24 (7seg) 1822 0x071E 0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y () U8 0 Y 0 1(1/10) 1110 0x0456 0 R/W drE (Zero-cut) U8 0 Y 010 0 0 1.0% 1140 0x0474

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

-L 3 5 HRZ002-H 4 HRZ004-L HRZ001-H 2 3 HRZ002-L 2 1 HRZ001-L 1 0 0 20 30 40 50 60 70 80 90 20 10 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W/008-W 4 HRZ008-W Heating capacity (kW) 3 HRZ002-W 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 81 Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L/002-L/004-L HRZ008

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

The material is stainless steel on auto switch equipped styles 20 and 25. Replacement Parts/With rubber bumper Bore size (mm)/Part No. 20 PDU-8Z PPD-20 CM-020-16-123 No.

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.