HRX-OM-W060

Example operation of electric conductivity control Target electrical conductivity value : 25.0 [S / cm] Electrical conductivity control hysteresis : 5.0 [S / cm] Electric conductivity [S/cm] 30 Target electrical conductivity value 25 20 Electric conductivity 10 Solenoid valve : Open Solenoid valve : Close 0 Elapsed time Fig.5-7 Example of electrical conductivity control 5.4 Description of

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

High Power Cylinder:

9 Wear ring CM-020-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A Resin @0 Piston gasket SO-012-13 SO-010-22 SO-010-23 SO-013-7 NBR @1 Cylinder tube gasket CM-020-16-123 CM-025-16-124 CM-032-16-126 CM-040-16-127 NBR @2 Rod seal PDU-10Z PDU-12LZ PDU-12LZ PDU-16Z NBR @3 O ring SO-017-30 SO-017-32 SO-017-34 SO-017-36 NBR @4 O ring SO-015-23 SO-015-23 SO-017-36 SO-017-37 NBR @5 4.10-10

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

ZR

to 0.45 W.

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

VQ5000

DC (42 mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA)

IDX-OM-W023

CM FM1 C11 PRS FM1 PRS P P FM2 C12 FM2 IDU11E-10 PC CM FM1 FM2 OLR ILS ILS PRS PTC OLR PTC PTC C01 C01 CM C11 C12 TB PC FM1 PRS P FM2 IDU Series 6-4 6 5 IDX-OM-W023 6 IDU15E1-10 PC ILS CM FM1 OLR PTC FM2 OLR ILS CM C01 C02 PTC PTC PRS CR PC C11 CR CR FM1 PRS C01 P C12 C02 FM2 C11 C12 IDU15E1-20/23 PE N L TB ILS CM OLR FM1 PTC FM2 OLR CM ILS PTC PTC CR PRS

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

NVZseies

N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

7.4

For manifold optional parts, refer to pages 755 to 757. 20 20 stations Cylinder port size Connector individual wiring Symbol Port size Manifold pitch M5 M5 thread C2 With 2 One-touch fitting C3 With 3.2 One-touch fitting C4 With 4 One-touch fitting CM Mixed sizes and with port plug Note) P, R port thread type Metric Symbol Manifold pitch 8.5 7.5 Nil Rc M5 F G N NPT T NPTF 8.5 N1 With 1/

Table of Contents

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

3 Way,3 Port Solenoid Valve NVZ Series

N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 53.5 32 40 50 20.5 20.5 26 M14 x 1.5 M14 x 1.5 M18 x 1.5 33.5 33.5 23.5 23.5 28.5 Basic Style O L 20 st A 20 st B Bore size (mm) C D E F H I J K M N P Q W Z 5 st 50 56.5 58.5 10 st 78.5 5 st 33 39.5 40.5 10 st 50.5 5 st 17 17 18 10 st 20 st 32 40 50 9 depth 7 9 depth 7 13 13 15 40 46.5 28 34.5 16 16 20 45 52 64 8.5 8.5 11 M8 x 1.25 M8 x 1.25 M10 x 1.5 60 69 86 10.5 10 13 14 14

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

MHZ

Axial Ported (with M5 port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) End boss assembly E D1 B D2 Model A 0.016 0.043 MHZJ2-10S CM 40 12f8 11 15 7 D2 0.016 0.043 MHZJ2-16S CM 43.5 16f8 15 20 10 0.020 0.053 MHZJ2-20S CM 51.7 20f8 19 22 12 D1 0.020 0.053 MHZJ2-25S CM 61.3 25f8 24 25 15 Other dimensions and specifications correspond to the standard type. 5 B E A Auto switch

IDX-OM-W093

IDF60/70-30 IDF80/90-30 CM OLR FM MC PRS PRS2 ILS THR C11 TB CN GFCI EDV PE APR CM FM MC PRS PRS2 ILS THR C11 TB CN GFCI EDV PE APR IDF60/70/80/90 Series 7-5 IDX-OM-W093 7.5 IDF60/70/80/90 Series 7-6 IDX-OM-W093 A 8 A 8.1 8.2 A (10) 8.3 8.4 IDF60-20-A IDF60-30-A IDF70-20-A IDF70-30-A IDF80-20-A IDF80-30-A IDF90-20-A IDF90-30-A 50Hz 2.3 4 5.8 7.1 3/min

CQS

Type/Without Auto Switch Graph (4) Anti-lateral Load Type/With Auto Switch D-X 25 Allowable lateral load W (N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50