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www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

Is E or F: For pressure switch for vacuum ,lead wire with connector (Length 2m) for pressure switch for vacuum G When 1.

1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3

ALM E Power I sens off An overflow of the position error counter inside of the controller is occurred. Position deviation counter overflow (01-196) overflow E Power Make sure there are no obstructions that interfere with the electric actuator movement.

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Entry-Mounting 04 o4 Tube o a o 06 s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

D-X Individual -X 73 Series MXS Construction y u i o w e !8 !9 !5 !7 q !1 !0 !6 !2 !3 !

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !