Table of Contents

1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White) 12 to 24

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

DC () Load Load Load Load Load IS 1.2 k Sensor input: +1 to 5 VDC 7.3 k Auto shift input (Yellow) DC (+) N.C. ISG Pressure is applied to a pressure sensor during the reset operation (a zero point adjustment) as follows: When compound pressure is used: 2.5% F.S. or more. When pressure other than compound pressure is used: 5% F.S. or more.

Electric Actuator

PROFIBUS DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes

Hydraulic

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

Fluoropolymer Piping Equipment

Dimensions Panel mount union reducing: LQ1P-R Panel thickness (Max. t) J W1 W2 M1 M2 B side A side H2 H1 E2 E1 L1 L2 Class 4 and 5 Panel hole diameter K Metric Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

High Power Cylinder Series RHC

Contact SMC when disassembly is required. 14 Wear ring Resin CX 15 Cylinder tube gasket NBR 16 Rod seal NBR MQ RHC RZQ D-X Individual -X 1205 Series RHC Dimensions: Basic Style 20 to 40 2 x Rc P NN GB GA H2 NN H1 MM 2 x NIf8 D NE C 1.5 1.5 Effective thread length 2 x FL AL E E Width across flats KA NF 10 10 N JD A K F N JC NA S + Stroke F H WH B ZZ + Stroke (mm) A AL B C D E F GA GB H H1

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

REC

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

RHC

mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1-05M BD1-06M BD1-01M BD1-08M BD1-10M BD1-02M

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(Band & Screw included) Auto switch models 25 32 40 Bore size (mm) 20 Bore size (mm) D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Axial foot CHM-L032 CHM-L040 CHM-L020 CHM-L025 Flange CHM-F032 CHM-F040 CHM-F020 CHM-F025 20 BMA2-020 BA-01 BD1-01M When ordering the axial foot type, order 2 pcs. for each cylinder. 25 BMA2-025 BA-02 BD1-02M 32 BMA2-032 BA-32 BD1-02 40 BMA2-040 BA-04 BD1-

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

(incl. band & screws) 25 32 40 Bore size (mm) 20 Auto switch models Bore size (mm) Axial foot CHN-L032 CHN-L040 CHN-L020 CHN-L025 D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Flange CHN-F032 CHN-F040 CHN-F020 CHN-F025 When ordering the axial foot type, order 2 pieces for each cylinder. 20 BMA2-020 BA-01 BD1-01M 25 BHN3-025 BHN2-025 BD1-02M 32 BHN3-032 BGS1-032 BHN1-032 40 BHN3-040 BH2

Round Type Hydraulic Cylinder

L tap 4 x J counter bore Related Products 4 x K 20: I-020B 25: I-032B 32: I-04A 40: IA-04 RR1 NDH10 DI A B E F G MM 45 RR1 MM NDH10 D +0.2 +0.1 E1 M C E1 R U U1 U1 A1 NX 8.6 A1 L1 L1 NX H Material: Cast iron Material: Rolled steel Material: Cast iron U (H8) Applicable bore size (mm) Part no. H G I J K L Part no.

High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

A_HEC-OM-K001

Signal 1 DC output 2 DC output 3 FG DC connector HED007-C2* (HED003-C2*, HED005-C2*) DDK D/MS3102A20-15S Connect the DC cable connector of Heat Exchanger. Pin No.

A

Nylon (max Temp 140 OF) K .

21

Bore size Stroke Head Flange (G): ClM3G R0.5 Effective thread length 2 x FL 4 x FD Mounting hole H2 2 x P 2 x NN G G Width across flats B2 2 x FD Mounting hole Width across flats KA C2 D H1 Corner of the cover I Eh8 FY B MM AL A H Z + Stroke S + Stroke F 1.5 Width across flats B1 Width across flats lNA 20 to 32 FX FZ FT 40 ZZ + Stroke Head Flange (G) (mm) AL 14.5 A 12 B 34 B1 13 B2 26 C2

17

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction