SJ3A6

assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly (Long elbow type) KJW02-C2 2 one-touch fitting assembly (Long elbow type) KJW07-C2 1/4" one-touch

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

E-P HYREG ® Series VY1

01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position

7.4

2 x 1/8 1(P) port = Thread type 9 (With One-touch fitting) 10.2 39.7 Stations 1 2 n D side U side 3 4 5 6 7 8 Grommet 300 (Lead wire length) 51.4 43 50.3 (Single solenoid) 72.8 (Double solenoid dual 3-port) 81 (Closed center) B 2 B 2 20 14 A 4 A 4 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port> 5 C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting M5: M5 thread

E-P HYREG ® Series VY1 1

10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line)

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/4, Option: None, Size: 42.5, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Copper-free, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Copper-free, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02

Air Cylinder

4 !2 !3 !4 !1 !0 !4 !4 Air-hydro With air cushion !4 !4 With Rubber Bumper/With Air Cushion Replacement Part: Seal Component Parts No.

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 48.6 21.3 P = 20.5 18 11 23.5 11.8 11.6 13.5 36.1 37.6 60.3 3 5 E 3 5 E 4 A 4 A 4 A 4 A 4 A 36 76.8 3 5 3 5 E E 59.5 4 A 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B 1 P 1 P C2 2 B 2 B 2 B 2 B 2 B 1 P C2 1 P X PE X PE C1 2 x M12 C1 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

Smooth Cylinder/Low Speed Cylinder

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (L/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (L/min (ANR)) 260 390

AC Servo Motor Driver

STARTUP 4 1 to 4 -19 4.1 Switching power on for the first time . 4 2 4.1.1 Startup procedure . 4 2 4.1.2 Wiring check . 4 3 4.1.3 Surrounding environment . 4 4 4.2 Startup in position control mode . 4 5 4.2.1 Power on and off procedures . 4 5 4.2.2 Stop . 4 5 4.2.3 Test operation. 4 6 4.2.4 Parameter setting . 4 7 4.2.5 Actual operation . 4 8 4.2.6 Trouble at start-up . 4 8 4.3 Startup in

Fieldbus System

3 2 D side U side Station 1 3/4: 3/4" Female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8

0.4

% 4 5 &"'6 7-#! 4 5 8!&&-) &"'6 " (-# %& -##!' -% @7 "#.,"' .%!$ 02 B"+"# 1(" (-# C&!' %-#(' D#$. %2/ $ 4 5 %-)# 7-#! " (-# 4 5 9(#6 &"'6 4 5 3!$ 7-#! " (-# 4 5 &.! : ( ! -'6! ($! 4 5 %"#*! 7-#! " (-# !%(#"& #4 5 9.%+&! 7-#! 4 5 8!&&-) 7-#! " (-# 4 5 ;%"2 7-#! 4 5 9(#6 7-#! " (-# 4 5 %"#*! &"'6 4 5 &.! 7-#! " (-# 4 5 3!$ : ( ! 4 5 9.%+&! : ( !