Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Low Maintenance Filter Series FN1

FN11V FPM KT-FN11V 7 Low Maintenance Filter Series FN1 Dimensions Rc 1/4 0 315 45 IN OUT B.C.D230 135 225 42 4-11 G46-15-02 Pressure gauge port size Rc 1/4 Note) Use the Pc 1/4 port marked with an asterisk when designing an air release circuit.

Pressure Gauge Guide

C 02 R 1 4 Note) Option C1 (Clear cover has protrusion. / Clear cover is removable.) is not compliant. 14-11-13 Pressure Gauge Guide Circuit Diagram Dimensions Without indicator light GP46 Limit indicator NC. (Red) NO. (White) Pointer (Green) COM. (Black) Setting screw Indicator light ( ): R 1/4 With indicator light GP46: With cover ring assembly (For panel mounting) NC.

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 0.2MPa, Connection Thread: R 1/8, M5 Female, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover Removable, Wrench Tighten

AU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Model IR AU100 AU200 AU300 Model VEX 4 1 8 3 , 8 1 4 1 Port size 950 1,450 1,600 Weight (g) AMR Standard Bowl guard ITV B31P B32P B32P AD32 G46-10-01 AD32 Bracket Accessory Option Float type auto-drain IC Note) Pressure guage with limit indicator Relieving