Bore size Standard stroke Long stroke (L and F only) CS1 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 Symbol Specifications CS2 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 -XB5 Oversized rod 50, 63 1200 Heat resistant (150C) -XB6 -XC3 Special port positions 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400
Chart (1) 400 st 500 st 600 st 700 st 400 st 500 st 600 st 700 st 10 5 4 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2.
50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20
(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P
OPTIONS AND AUXILIARY EQUIPMENT Table 13.4 Servo motors leakage current example (Igm) Servo motor output [kW] Leakage current [mA] 100 / 200 / 400 / 750 0.1 Table 13.5 Driver's leakage current example (Iga) Driver capacity [kW] Driver capacity [kW] 100 / 200 / 400 0.1 750 0.15 Table 13.6 Leakage circuit breaker selection example Driver Driver LECSC2-T 15 (2) Selection example Indicated below
200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.
(Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S
Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.
BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.
Hence, if a home position return is made at the creep speed of 100r/min, an error of 400 pulses will occur in the home position. The error of the home position is larger as the creep speed is higher.
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 25 32 40 143 156 168 181 206 231 256 147 160 172 185 210 235 260 149 162 174 187 212 237 262 181 194 206 219 244 269 294 For short strokes, a solenoid valve may protrude from the rod cover end.
Air cushion Cushion Screw-in type Piping M5 x 0.8 Relief port size 50 to 400 mm/s Piston speed Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.
Size: 32, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 100mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)
Size: 32, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 50mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)
Size: 32, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: A (Size 16: 10; Size 25: 12; Size 32: 16), Stroke: 150mm, Motor Option: without Option, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)