Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.05 to 0.7, Specification: Built-in magnet, Port

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 50mm

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 75mm

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 20mm

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 30mm

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 10mm

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Table of Contents

Caution 5 150 100 200 300 1.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Smooth Cylinder/Low Speed Cylinder

80 100 Applicable pin O.D.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment: