Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Table of Contents

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Adapter B Ejector indication Nozzle dia./1.8, 2.0 mm ZR1-W 1 18 20 2 1 1 1 1 1 (Mounting hole) Silencer Adapter E Spacer B (Mounting hole) Rc 1/8 V port (Vacuum port) 1 M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

Air Cylinder

8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port size (A, B port) VQ7 Type of actuation Nil Non-locking push type 1 Single solenoid 2 Double solenoid 1 8 02 01 Rated voltage B Locking type B EVS 1 4 C Locking type C 1 2 100 VAC, 50/60 Hz 3 Closed center R port of VF370 is Rc. 200 VAC, 50/60 Hz 4 Exhaust center VFN 3 5 Pressure center 110 V to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 4 4 Light/Surge voltage suppressor 5 24 VDC 12 VDC

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

CRB2/CRBU2/CRB1

B port A port 1-1> 1> B port A port B port A port Clockwise Clockwise CRB1 Free-Mounting Type CRBU2 CRB2 Hatched area represents a stopper lever.

Stability of suction position,

Core sheet XT661 D Seal Dimensions t d Material: Core sheet Rolled steel Seal NBR Part no. d B H Sales unit ZPNA-M6 M6 x 1 8 3 Dimensions 10 pcs. ZPNA-M12 M12 x 1.25 19 7 ZPNA-M14 M14 x 1 19 5 ZPNA-M16 M16 x 1.5 22 6 Part no. t D Applicable thread size ZP3EA-SW6 1.3 14 M6 x 1 ZP3EA-SW10 1.6 15.5 M10 x 1 ZP3EA-SW12 2 24.3 M12 x 1.25 ZP3EA-SW16 2 28 M16 x 1.5 H B 2 pcs.

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

LEC-OM02704CN

9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

24

D-X 447 MGP Series Construction/MGPL Series, MGPA Series MGPL12 to 25 MGPA12 to 25 MGPL32 to 100 MGPA32 to 100 !7 !1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

5 R 3/5 R 4 A 4 A 4 A 4 A 4 A 63.3 79.8 1 P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R) port] One-touch fitting 1 P 2 B P 1 2 B 2 B 2 B 2 B -+ -+ : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] 1/4,3/8 -+ -+ One-touch fitting Applicable tubing O.D.: 6, 1/4" (X: External pilot port) Applicable tubing O.D.: 6,

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71) 100 (100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

Cylinder with Lock

Note 32 Tie-rod Carbon steel 4 Zinc chromated 33 Tie-rod nut Rolled steel 8 Zinc chromated 34 Flat washer Steel 8 80, 100 35 Bumper A Urethane 1 36 Bumper B Urethane 1 37 Wear ring B Resin 1 38 Rod end nut Carbon steel 1 Zinc chromated 39 Magnet (1) 40 Rod seal B NBR 1 41 Piston seal B NBR 1 42 Cushion seal A Urethane 1 43 Cushion seal B Urethane 1 44 Cushion valve seal NBR 2 45 Cylinder

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.O. (A contact) G GD GB GDB GU GUB 1 1 1 1 1 1 GXL-8F GXL-8FI GXL-8FB GXL-8FIB GXL-8FU GXL-8FUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state N.C. (B contact) LXF LXS LXP LXS N.O. (A contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.C.

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state 1 1 1 1 1 1 N.O. (A contact) N.C. (B contact) Standard stroke 50 1.9 75 2.1 100 2.3 125 2.5 150 2.7 mm kg C kg mm/s mm N.C. (B contact) N.O. (A contact) Body weight N.C.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.