JXCx-OMT0023

(Target position) time constant time constant speed [r/min] [ms] function [10STMm] [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

Cylinder with Lock

2 (Different surfaces) 60 65 75 80 85 2 (Same surface) 90 95 100 105 110 D-G39 D-K39 D-A3 n (Different surfaces) 60 + 30 (n 2) (n = 2, 4, 6, 8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4,

C95

Series CS1 Series MB, Series MB1 Series MGG Bore size (mm) Bore size (mm) Bore size (mm) Port size Port size Port size 125 32 NPT 1/2 20 NPT 1/2 140 40, 50 NPT 3/4 25 NPT 1/8 160 63, 80 NPT 3/8 32 NPT 3/4 180 100 NPT 1/2 40 200 50 NPT 1/4 250 63 NPT 1 300 NPT 3/8 80 NPT 1/2 100 Standard model no.

Table of Contents

Symbol Symbol 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100

MB

Same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130 + 55 (n4) 2 (n4) 2 105 + 55 n = 4, 8, 12, 16 100 + 55 140 + 55 n (Same side) D-F5NTL n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 100 140 105 120 125 130 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7 W 95 100 105 80 85 90 (n4) 2 (n4) 2 (n4) 2 (n4) 2 100 + 40 (n4)

Electric Slide Tables

100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 200

4/5 Port Solenoid Valve

voltage suppresser AC specifications ( Hz) 50 60 1 100 VAC 2 200 VAC "YOZ" is not available.

Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

C95

2 2 1 100 200 300 400 500 1000 1 100 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 6-12-28 29 Series C95N Specific Product Precautions 1 Be sure to read before handing.

15

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !

CNA

1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !9 @2 @6 $4 A section B section (Release piston bushing) (Piston guide bushing) 100 80 63 50 40 50, 63, 80, 100 @9 !2 !2 Description Material Note Component Parts Description Material Note No. No.

CNA

0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control 8 1000 1000 100 100 0 0 LEC-MR-J3BAT MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10