sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

PF2D

Viscosity: 3mPas (3cP) or less Detection style Karman vortex Rated flow range 0.4 to 4 L/min 1.8 to 20 L/min Note 1) 4 to 40 L/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Accuracy Note 4) 2.5% F.S. (at 25C water) Repeatability 1% F.S.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

SEMI How to Order 002 H HRW Fluorinated FluidType Option Cooling capacity Option Symbol Symbol 002 008 015 030 Cooling capacity None Nil C D N Z 2 kW Analog communication 8 kW DeviceNet communication 15 kW NPT fitting 30 kW Circulating fluid automatic recovery Pump inverter control Temperature range setting Pump inverter control None Applicable (Pump inverter type) Symbol 68 to 194F (20 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W704TWater, Mixture of water (50%) and ethylene glycol (50%)0.35 to 4.5 l/min0.35 to 4.5 l/min0.5 to 4 l/min0.05 l/min0.05 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W704TWater, Mixture of water (50%) and ethylene glycol (50%)0.35 to 4.5 l/min0.35 to 4.5 l/min0.5 to 4 l/min0.05 l/min0.05 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W720TWater, Mixture of water (50%) and ethylene glycol (50%)1.7 to 17.0 l/min1.7 to 17.0 l/min2 to 16 l/min0.1 l/min0.1 l/pulse0 to 90C

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (

sResponse timeHysteresisPower supply voltageResistance--Real-time flow rateAccumulated flowSwitch outputAccumulated pulse outputEnclosureOperating temperature rangeWithstand voltageInsulation resistanceVibration resistanceImpact resistanceNoise resistancePF2W740TWater, Mixture of water (50%) and ethylene glycol (50%)3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 90C (