Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

Electric Actuator

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).

Step Motor Controller

100 LECSA1-S3 200 LECSA2-S1 100 LECSA2-S3 200 Model Compatible motor capacity [W] Incremental 17-bit encoder (Resolution: 131072 pulse/rev) Compatible encoder Power voltage [V] Allowable voltage fluctuation [V] Rated current [A] Control power supply voltage [V] Allowable voltage fluctuation [V] Rated current [A] Single phase 100 to 120 VAC (50/60 Hz) Single phase 85 to 132 VAC Single phase

CRBU

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Electric Actuator

LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W] 100 200 100 200 Incremental 17-bit encoder Compatible encoder (Resolution: 131072 pulse/rev) Power voltage [V] Allowable voltage fluctuation [V] Rated current [A] Control power supply voltage [V] Allowable voltage fluctuation [V] Rated current [A] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz

ZX

PV port and V port can be connected.

Electric Actuator/Slider Type

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Series SV

CANL FG BS+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal

Environment

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Compact Guide Cylinder

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color indicator) Reed auto switch Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 IC circuit 2-wire 24 V 12 V 100 V A93V2 A93 Relay, PLC No 100 V or less A90V A90 IC circuit

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Vacuum Ejector Series ZM

Vacuum 1/8 (Rc, NPTF, G) Vacuum port (V) 1/8 (Rc, NPTF, G) Vacuum port (V) (Side entry style is equipped with plugs.)

LJ1H

LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W] 100 200 100 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage range [V] Rated voltage [A] Control power supply voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main Single phase 85 to 132 VAC Single phase 170 to 253 VAC

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W] 100 200 100 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage range [V] Rated voltage [A] Control power supply voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main Single phase 85 to 132 VAC Single phase 170 to 253 VAC

Programless Controller Series LECP1

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

Step Motor Controller

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

Title not found

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

LG1H

LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W] 100 200 100 200 Incremental 17-bit encoder (Resolution: 131072 p/rev) Compatible encoder Power voltage [V] Allowable voltage range [V] Rated voltage [A] Control power supply voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main Single phase 85 to 132 VAC Single phase 170 to 253 VAC

ITV

Use 0 V as the baseline for the power supplied to this product for output, control and input. +24 V +24 V Output power Output power 0 V 0 V Control/Input power Control/Input power 24 V +24 V 4. Each product needs to be powered by one power supply unit.

Table of Contents

24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz 4/2 5/3 (A/B R1/R2) 3 position Closed center Double Single Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal VQ130 0.73 0.84 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258