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Please contact SMC for details if one prefers changing this material. 2) When pressure gauge needs to be assembled with regulator when shipment, put this code as gauge port in How to Order. 94 Regulator / Pressure Gauges Guide AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators For AK/BP series

Please contact SMC for details if one prefers changing this material. 2) When pressure gauge needs to be assembled with regulator when shipment, put this code as gauge port in How to Order. 94 Regulator / Pressure Gauges Guide AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators For AK/BP series

Protected earth 1 to 20 kV 0 to 0.99 kV Minimum display unit: 0.01 kV Minimum display unit: 0.1 kV : The detecting range of the sensor is 180 mm (at a detection distance of 50 mm). Safety Instructions Function settings Assembly Troubleshooting Power ON When the is pressed with the power supply off, the power supply will be turned on.

-13S BP-14S BP-15S L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

-13S BP-14S BP-15S L-131S L-135S FQ-OP001 BP-13S For port size Rc 1 For port size Rc 3/4 For port size Rc 1/2 Bracket Stainless steel 304 BP-14S BP-15S 272 Low Maintenance Filter Series FN1/FN4 P.483 1 Replacement Procedure is Replacement Parts and Seal List How to Order Actuators Modular F.R.L.

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

37.3) 0.94 (23.9) 0.715 (18.2) 3.86 (98.0) A A AP3150 Indicator switch AP3157 1.87 (47.5) AP3150 1.88 (47.8) AP3100 2.12 (53.8) Indicator switch (Option) AP3157 4.46 (113.3) AP3150 3.94 (100.1) AP3100 3.74 (95.0) 0.715 (18.2) A A AP AP 2.0 (50.8) 2 x 10-32 UNF depth 0.35 (8.9) (Mounting hole) SL 1.5 (38.1) AZ Connections inch A 45 (mm) AK FV4 MV4 TW6 FV8 MV8 TW8 FV12 MV12 TW12 2.00 (50.8) BP

1.0 kV 25 to 90C Connector Ambient temperature 5 to 80C Operating Cable 40 to 80C Fixed Protection class IP67 (Only with screw tightened) 200 Allowable repeated insertion/withdrawal Cable retaining force 150 N/15 sec. 250 N/15 sec.

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB BP Lock port for pressure lock (Plug with

Element 2 O-ring 3 Bracket BP-25S BP-16S BP-17S 1112 Series ZFC Air Suction Filter / In-line Type With One-touch Fittings Dimensions ZFC05 Applicable tubing O.D. L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com BP Lock port for pressure lock (Plug with breathing hole for spring lock) Y + Stroke Z + Stroke AB AP V CNA CNS CLS CLQ MLGP WH (Max.)

Specifications IZH10 Model 20.0 kV Rated charge amount range 0.1 kV (1.0 kV to 20.0 kV), 0.01 kV (0 to 0.99 kV) Minimum display unit 50 mm (between sensor part and measured target) Measurement distance 1.5 VDC 2A alkali dry cell battery, 2 pcs (continuous use for 15 hours or more, see Note 2)) Power supply Note 1) 5% F.S. 1 digit Display accuracy IP40 Enclosure Environment Operating: 0 to

RoHS-compliant electrostatic sensor monitor that can be vertically or horizontally mounted.Features · Minimum unit setting: 0.001 kV (at ±0.4 kV), 0.1 kV at ±20 kV).· Display accuracy: ±0.5% F.S. ±1 digit or less.· Detection distance correction function (adjustable in 1 mm increments).· Supports two types of sensors (±0.4 kV, ±20 kV) using range selection.· 2-color (Red/Green) display.· Connection

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

They are as tollows: r_.013) C = 4 0 0 ' C v ' Q=21.94'kv Q = 2 2 . 2 ' s ' t-=---:-=-;;-| LtJ .t(Dz + ruJ.s,| . Ap.1l;;-v s ' . ' \ t n !

AI RLQ AM W Cutout window MLU View A-A' MLGP Mounting dimensions Standard Stroke ML1C (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B BP Note 3) BZ GC GD GK Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 134 150 92 108 9 9 75 140 M8 32 135 1/8 73.5 28 54 3.5 104 16 16 160 176 110 125 9 9 88 165 M8 37 160 1/8 86.5 29 62 4 75, 100, 125 150, 200, 250 300 104 16 16

245.7 345.7 445.7 545.7 645.7 745.7 845.7 945.7 1045.7 1145.7 1345.7 400 500 600 700 800 900 1000 1100 1200 1300 1500 50 150 250 350 450 550 650 750 850 1050 70 170 270 370 470 570 670 770 870 1070 Note) Dimensions inside ( ) are for a 100mm stroke. 4 Series LG1H High Rigidity Direct Acting Guide Type LG1H20: Without Coupling / Construction 9 5 bn bn 4 8 1 3 2 bs A A' bl bq br bm bt bo bp

BP Caution Since the product specified here is used under various operating conditions, its compatibility with fluid and specific equipment must be decided by the person who designs the equipment or decided its specifications based on necessary analysis and test results.

IDU BP 305 IDU BP 313 Applicable dryer Applicable dryer Applicable dryer IDU3E IDU4E IDU6E Please refer to page 13 for dimensions. Symbol 305 306 307 Applicable dryer IDU3E IDU4E IDU6E Please refer to page 13 for dimensions. Symbol 313 314 315 10 12 Accessory (Option) Separately Installed Transformer/Dimensions IDF-TR500-1 A C OUT PUT B IN PUT E D 4-F Input cord 2 m Transformer part no.

IDU BP 305 IDU BP 313 Applicable dryer Applicable dryer Applicable dryer IDU3E IDU4E IDU6E Please refer to page 13 for dimensions. Symbol 305 306 307 Applicable dryer IDU3E IDU4E IDU6E Please refer to page 13 for dimensions. Symbol 313 314 315 10 12 Accessory (Option) Separately Installed Transformer/Dimensions IDF-TR500-1 A C OUT PUT B IN PUT E D 4-F Input cord 2 m Transformer part no.