2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

to Order, Flow Rate Characteristics, Applicable Fluid Checklist p. 35 Construction, Common Specifications p. 36 High Flow/ Power Saving Type Working Principle p. 37 Direct Operated 2-Port Solenoid Valve JSXmmU Series p. 11 Dimensions JSXZ30 Port Size 1/4, 3/8 Body Material Stainless Steel, Brass, Aluminum p. 38 JSXZ40, 50, 60 Port Size 1/2, 3/4, 1 For Water Oil Air Body Material Stainless

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

CY1

B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5

Electric Actuator/Slider Type

H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1000 1000 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) i Actuator cable length [m] o Driver type !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

XL

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

Modular F.R.L. Unit

38.5 42.5 B 190 242 278 V 30 31 35.5 J 27 30.5 38.5 K 5 3.5 1.5 M 30 41 50 N 34 40 54 Q 5.4 6.5 8.5 S 15.4 8 10.5 P 44 46 54 U 2.3 2.3 2.3 T 55 53 70 AWD20 AWD30 AWD40 173 201 239 73 86 92 52 59 75 40 57 73 45 50 70 40 53 70 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With barb fitting With drain guide Metal bowl B 173 214 252 Metal bowl with level gauge Model B B B AWD20 AWD30

SX

SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv P N P N P N 1 8 1 4 1 4 SS5X3-20 SS5X5-20 SS5X7

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

A

Model Port size A B C D E F G H J K L M N P B B S Y M B O L S NAC1000 M5X0.8 91 84.5 25.5 25 26 25 33 20 4.5 7.5 5 17.5 16 38.5 86.5 NAC2000 18 14 140 125 38 40 56.8 30 50 24 5.5 8.5 5 22 23 50 120.5 NAC3000 38 181 156.5 38 53 60.8 41 64 35 7 11 7 34.2 26 70.5 182 NAC4000 12 238 191.5 41 70 65.5 50 84 40 9 13 7 42.2 33 88 217 NAC5000 34 300 271.5 48 90 75.5 70 105 50 12 16 10 55.2 40

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

Free Mount Cylinder

1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

CM2

265 213 278 290 Clevis Pivot Bracket 1 to 50 51 to 100 151 to 200 201 to 250 101 to 150 Bore size (mm) LY LV LT LP LH LG LD LF Q P Bore size (mm) LZ LZ LZ LZ LZ 59 18.4 3.2 37 30 30 6.8 15 20 20 177 202 227 21.5 6 59 18.4 3.2 37 30 30 15 6.8 25 25 181 206 231 24.5 6 75 28 4 50 40 40 15 9 32 32 199 224 274 249 27 6 75 28 4 50 40 40 15 9 40 40 228 253 303 328 278 32.5 8 6-4-50 Proper

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1