P Signals and terminal status can be monitored. P Parameters can be set.
180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63
force during pushing operation P P Trigger LV Set in units of 1% No setting required (same value as pushing force) Target force during pushing operation P P Pushing speed Set in units of 1 mm/s Fixed value Speed during pushing operation P P Positioning force Set to 100% Fixed value Force during positioning operation P P Area output Set in units of 0.01 mm Conditions for area output
Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 1Ry 5mA Servo ON 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS N-OT
Specifications P.47 Construction P.49 Dimensions P.50 Dimensions of Accessories (Options) P.63 Precautions P.63-2 Air Cylinder: Standard Type Double Acting, Double Rod CJ2W Series How to Order P.64 Specifications P.65 Construction P.67 Dimensions P.68 Air Cylinder: Standard Type Single Acting, Spring Return/Extend CJ2 Series How to Order P.71 Specifications P.72 Construction
a <> ABSINC ABS() / / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00
9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.
V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .
Cyl.Dia Mass (kg) T 60" 45' 30' e u 0.01 po.2 p 0.01 It 0.2 p 0.01 p 0.2 tr 0,01 It 0.2 25 100 50 25 12.5 51.8 (87.2) 80 40 20 1 0 32 180 90 45 22.5 54.9 (s5.6) 47.8 53 78.4 39.2 4 2.2 '| .
2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
(Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending
0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5
High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 3-Screen Display High-Precision Digital Pressure Switch ZSE20A(F)/ISE20A Series How to Order p. 11 Specifications p
Q Note) CE-compliant Note) DIN terminal D only for 100 VDC XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve (Bellows pressure balance, 2-stage voltage switching type) Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 5 100 VAC 200 VAC 24 VDC Control power supply P With control power supply Note) There are no CE-compliant