11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Cylinder stroke (mm) Nil C M Standard strokes (mm) 5, 10, 15, 20, 25, 30 Bore sizes (mm) Action 12, 16 D Double acting 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Auto switch specifications Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV

10

surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces, same surface) 15 25 30 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 30 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-F5NT 1 10 25 30 D-Y59l

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Indicator light Special function Electrical entry Wiring (output) Electrical entry direction 0.5 (Nil) 3 (L) 5 (Z) Applicable loads Type DC AC Perpendicular In-line A96 A96V 3 wire (NPN equiv.) 5V IC circuit A96L A96VL Reed switch Solid state switch Yes A93 A93V 100V Grommet A93L A93VL Relay, PLC 2 wire 24V A90 A90V 5V, 12V No 100V or less IC circuit A90L A90VL F9N F9NV

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil (Example) A93 3 mL A93L

type: M5 × 0.8, Auto Switches: A93L, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

type: M5 × 0.8, Auto Switches: A93L, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

type: M5 × 0.8, Auto Switches: A93L, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

type: M5 × 0.8, Auto Switches: A93L, Lead Wire Length(m): 0.5, The number of the switches: 1, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

This is a legacy product, and replaced byCDQSB25-25+45DM-A93L-XC10, CYL, COMPACT, DBL ACT, AUTO-SW, ACTUATOR, CQS COMPACT CYLINDER, IE, 25MM CQS DBL-ACT AUTO-SW, .00000 lb

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

, 32 25, 50, 75, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 CP95 Single knuckle joint Option Double knuckle joint 25, 50, 75, 100, 125, 150, NCM 40, 50, 63 (With pin) 200, 250, 300 Pin and snap ring are shipped together with double knuckle joint.

MGG

9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

MB

25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25 25 25 30 2 (Different sides or Same side) 15 C85 (n2) 2 (

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

A2 A1 E1 L1 MM RR1 U1 NX CJ2 Material: Carbon steel d (Drill through) Applicable cotter pin l Applicable bore size (mm) Dd9 I-12 I-14 I-16 I-18 I-20 I-25 I-30 125 140 160 180 200 250 300 +0.084 0 0.1 0.3 L m 25 32 Part no. 8 54 46 100 M30 x 1.5 27 33 CM2 125 140 160 IY-12 IY-14 IY-16 IY-18 IY-25 IY-30 +0.084 0 0.1 0.3 0.065 0.117 28 36 25 8 54 48 105 M30 x 1.5 30 39 79.5 69.5 4 5 4 x 40 +

, 25, 32, 40, 50, 63; Variety of switches and lead wire lengths

, 25, 32, 40, 50, 63; Variety of switches and lead wire lengths

, 25, 32, 40, 50, 63; Variety of switches and lead wire lengths